两步广义相移干涉术的光学实验验证

提出了一种基于两步广义相移干涉术的波前再现技术以及基于衍射场统计特性的未知相移值提取算法,并且进行了光学实验验证.该方法中可仅利用两幅干涉图及一次不需精确预设的未知相移,参照物光光强和参考光光强,即可通过计算提取真实的相移量,进而恢复出物波波前复振幅,而无需借助傅里叶谱分析或数字滤波等操作.在光学实验中,对借助于空间光调制器（SLM）的间接输入和三维漫反射物体直接输入两种情况进行了详细地研究,得到的光学实验结果验证了所提方案的有效性和可行性. 关键词： 信息光学 相移干涉术 波前再现 数字图像处理     

一种重构高功率激光束波前的方法

介绍一种对“星光Ⅱ”１０＾１２Ｗ高功率激光器的波前相位进行重构测量的研究方法。实验中对高功率激光束经过孔阵列相位传感器在像纸上烧蚀成的光斑阵列进行图像处理,测定各光斑光强中心及相对位移,再由理论分析得到实用的迭代算法公式,重构出高功率激光束波前。     

Simple direct extraction of unknown phase shift and wavefront reconstruction in generalized phase-shifting interferometry: algorithm and experiments

An algorithm to extract the arbitrary unknown phase shift and then reconstruct the complex object wave in generalized phase-shifting interferometry (GPSI) without the iteration process and measurement of object wave intensity is proposed. This method can be used for GPSI of any frame number >or=2. Both computer simulations with smooth and diffusing object surfaces and optical experiments have verified the effectiveness of this method over a wide range of phase shifts with very satisfactory results.     

两步相移数字全息物光重建误差分析与校正

系统研究了两步相移数字全息干涉术中相移误差引起的波前再现误差的计算和校正方法. 基于衍射物光相位分布的随机性和振幅相位的相互独立性原理,介绍了相移数字全息中物光波前再现误差的表达形式,推导出步长为π/2的两步算法中物光重建误差的表达式. 通过进一步分析这一重建误差的结构和特点,结合物光表达式,给出了自动校正相移误差引起的波前重建误差的校正方法. 该方法无需增加测量,在未知相移误差大小的情况下,只对标准两步相移算法恢复的物光复振幅进行处理就可以实现对物光振幅和相位的同时校正. 计算机模拟结果表明,校正后可将 关键词： 相移干涉术 数字全息 物光重建 误差校正     

Enhanced wavefront reconstruction by random phase modulation with a phase diffuser

A phase retrieval technique for enhanced wavefront reconstruction using random phase modulation and a phase diffuser is proposed. The speckle field generated is sampled at multiple axially displaced planes and the speckle patterns are used in an iterative algorithm based on the optical wave propagation in free space. The presentation of this technique is carried out using two setups. In the first setup, a diffuser plate is placed at the image plane of a metallic test object. The benefit of randomizing the phase of the object wave is the enhanced intensity recording due to high dynamic range of the diffusely scattered beam. The use of demagnification optics will also allow the investigations of relatively large objects. In the second setup, a transparent object is illuminated using a wavefront with random phase and constant amplitude by positioning the phase diffuser close to the object. The benefit of phase-only modulation is the increased resolution of the phase structures of the transparent test objects.     

Physical spherical phase compensation in reflection digital holographic microscopy

Reflection configured digital holographic microscopy (DHM) can perform accurate optical topography measurements of reflecting objects, such as MEMs, MOEMs, and semiconductor wafer. It can provide non-destructive quantitative measurements of surface roughness and geometric pattern characterization with nanometric axial resolution in real-time. However, the measurement results may be affected by an additional phase curvature introduced by the microscope objective (MO) used in DHM. It needs to be removed either by numerical compensation or by physical compensation.We present a method of physical spherical phase compensation for reflection DHM in the Michelson configuration. In the object arm, collimated light is used for illumination. Due to the use of the MO, the object wavefront may have a spherical phase curvature. In the reference arm, a lens and mirror combination is used to generate a spherical recording reference wave in order to physically compensate the spherical phase curvature of the object wavefront. By controlling the position of the mirror and the sample stage, the compensation process has been demonstrated. The relative positions of the test specimen and the reference mirror must be fixed for the physical spherical phase to be totally compensated. A numerical plane reference wave is preferred for the numerical reconstruction of the phase introduced by the test specimen. Experimental results on wafer pattern recognition are also given.     

Blind phase shift extraction and wavefront retrieval by two-frame phase-shifting interferometry with an unknown phase shift

An iterative algorithm to extract the arbitrary unknown phase shift in two-frame phase-shifting interferometry and then reconstruct the complex object wave is proposed. In combination with the least square principle and some calculation formulae we developed, this algorithm allows us to find the value of unknown phase shift by using only two interferograms without additional knowledge or measurement. Computer simulations have shown that this algorithm works well for both the smooth and diffusing objects to a very high accuracy over a wide range of the phase shift from 0.4 to 2.5 rad.     

基于窗口傅里叶变换剪切干涉法波前检测

提出了一种利用二维窗口傅里叶变换从径向剪切干涉条纹中准确得到波前的重建技术。首先对剪切干涉条纹做二维窗口傅里叶变换,设置阈值和频率积分范围后,进行二维窗口傅里叶逆变换,然后对包裹相位做去载频和相位展开处理得到相位差分布,最后使用波前迭代算法从相位差中复原实际波前。模拟计算表明,使用该方法最大相位复原误差为0.82%,均方根值为0.020 9 rad,实验结果验证了该方法的有效性。同时也对窗口傅里叶变换的关键参数,如窗函数的选择、窗口大小的确定以及阈值的选取等进行了简要讨论。与传统傅里叶变换法(FFT)相比,基于窗口傅里叶变换的剪切干涉波前检测法有更高的精度和稳定性,为波前检测提供一种新的处理方法。     

Error compensation of four and five buckets wavefront extraction algorithms in phase-shifting interferometer

The phase-shifting method is all along an important wavefront extraction technique in the interferometer. Moreover, to require almost real-time measurement an algorithm with a small number of grabbed buckets is very helpful to the phase-shifting interferometer. Therefore, those algorithms within five buckets are very practical and are given more attention. In the paper, popular phase shifting algorithms within five buckets are compared and new four and five buckets algorithms are developed to compensate for two dominate error sources which are linear phase shift deviation and detector nonlinearity. Numerical simulations and wavefront extraction experiment verify that the proposed compensation algorithms are insensitive to linear phase shift deviation and detector nonlinearity compared with classical four and five bucket algorithm.     

Two-frame phase-shifting interferometry for retrieval of smooth surface and its displacements

A new two-frame interferometric method with a blind phase shift of a reference wave is proposed for the reconstruction of smooth surface relief areas. In this method, a correlation approach based on the determination of correlation coefficient between intensity distributions of two interferograms is applied for the phase shift extraction. An algorithm for this method realization is developed and its performance is verified on test surfaces. An experimental setup containing a Twiman-Green interferometer was used in the reconstruction of smooth surfaces of metal specimens using the developed algorithm. Surface displacement phase fields were generated in case of a CT-notched specimen made of an aluminum alloy by the interactive procedure of element stitching of two surface reliefs and subtracting the surface relief after cyclic loading from the initial one. The received surface displacement fields allow us to determine the studied specimen fatigue process zone (FPZ) and FPZ size.     

Selective edge enhancement in three-dimensional vortex imaging with incoherent light

We demonstrate a new imaging method enabling a selective edge contrast enhancement of three-dimensional amplitude objects with spatially incoherent light. The imaging process is achieved in a spiral modification of Fresnel incoherent correlation holography and uses a vortex impulse response function. The correlation recordings of the object are acquired in a one-way interferometer with the wavefront division carried out by a spatial light modulator. Two different methods based on applying a helical reference wave in the hologram recording and a digital spiral phase modulation in image reconstruction are proposed for edge enhancement of amplitude objects. Results of both isotropic and anisotropic spiral imaging are demonstrated in experiments using an LED as an incoherent source of light.     

Comparison of results of interferometric phase extraction algorithms for three-dimensional flow-field tomography

A comparison of the results of interferometric phase information retrieval and subsequent tomographic reconstruction from deformed wavefront projections by phase unwrapping is presented. In interferogram processing, conventional fringe tracking and Fourier transform methods have been utilized for comparison. With these methods by injecting carrier fringes, the projection data of any axial cross section can be extracted in all projection directions to implement three-dimensional tomographic reconstruction. The results of experiments of a simulated temperature field prove that the phase extraction based on the Fourier transform method produces tomographic reconstruction much superior to the conventional fringe tracking technique.     

一种在二步相移数字全息中实现准确相移的方法

相移数字全息中的相移准确性决定了重建结果的质量,本文提出了在二步相移数字全息中实现准确相移的方法.该方法使用数字电压源开环控制普通的压电陶瓷微位移器,通过连续以微小的间隔来改变施加在压电陶瓷微位移器上的电压,可以获得一系列对应于不同相移角的全息图像,进而可以利用这些全息图像重建出来物光波在全息面上的强度分布.实验中采用已被CCD直接记录的物光波在全息面上的强度分布作为标准来评价前面重建结果的质量,计算了这些重建结果和评价标准之间的相关系数,结果表明相关系数达到最大时对应的全息图具有准确的相移角π/2.实验中比较了使用所确定准确相移角和理论相移角分别重建出来物光波的质量,计算机模拟和实验的结果证实了该方法的有效性.     

波前重建中的高通滤波消零级衍射干扰研究

根据可变放大率物光波前重建过程中球面波照射下数字全息图频谱的分析,提出在重建波照射前对全息图进行高通滤波消零级衍射干扰的方法.对物体表面为散射及非散射面情况的波前重建进行理论模拟及实验研究.结果表明,当物体表面是散射面时,可以获得有效消除干扰的重建图像,但是,当物体表面是光学平滑表面时,为得到完整的重建图像,要求将更为...     

基于两步正交相移干涉的振幅图像光学加密技术

提出一种基于两步正交相移干涉的光学图像加密技术.这种相移干涉数字全息只要记录两幅干涉图,不需要记录物光波和参考光波的强度信息,就可以再现没有零级像和共轭像的再现像.物光波对应的光路经过两次菲涅尔变换,并结合双随机相位编码.参考光分别引入0和π/2相位,用数字化记录介质记录两幅数字全息图作为加密图像.解密时只要获得正确的密钥,经过简单的计算就可以重建清晰的原始图像.模拟实验验证了它的可行性和有效性,分析了抗裁剪和噪音的鲁棒性.     

像面滤波技术在无透镜傅里叶变换数字全息中的应用

无透镜傅里叶变换数字全息波前重建主要采用全息图的一次快速傅里叶变换方法,重建图像不能充分占有重建平面.本文基于像平面滤波技术,提出对物体局部区域光波场进行放大重建并让重建图像布满重建平面的方法,给出具有精细结构物体的数字全息波前重建实例.此外,将数字全息光波场重建视为具有方形出射光瞳的光学系统的相干光成像过程,导出了物体放大图像的分辨率与光学系统相关参量的关系,并通过实验给予证明.     

像面滤波技术在无透镜傅里叶变换数字全息中的应用

无透镜傅里叶变换数字全息波前重建主要采用全息图的一次快速傅里叶变换方法,重建图像不能充分占有重建平面.本文基于像平面滤波技术,提出对物体局部区域光波场进行放大重建并让重建图像布满重建平面的方法,给出具有精细结构物体的数字全息波前重建实例.此外,将数字全息光波场重建视为具有方形出射光瞳的光学系统的相干光成像过程,导出了物体放大图像的分辨率与光学系统相关参量的关系,并通过实验给予证明.     

FFT动态相位重建算法的滤波窗影响分析

为了优化相位重建算法,针对波面干涉图的傅里叶频谱,分析了不同滤波窗口的分布特征和频谱响应,通过计算机仿真和实验测试,确定了FFT动态相位重建算法的最佳滤波窗口类型。其中处理仿真干涉图重建的波面与原始波面的波面峰谷值残差为0.008 5λ,波面均方根值残差为0.000 1λ;处理实验干涉图获得的波面与移相干涉测量法获得的波面峰谷值残差为0.009 3λ,波面均方根值残差为0.000 5λ。结果表明:选取Hamming窗进行滤波处理并重建的相位经拟合后得到的波面较参考波面的面形残差最小,相位重建精度优于0.01λ,可进一步应用于大口径光学元件的测量中。     

Wavefront coding technique for controlling thermal defocus aberration in an infrared imaging system

We use a wavefront coding approach to control thermal defocus aberration in an IR imaging system. The design method of athermalized system using a wavefront coding technique is discussed. An athermalized long wave IR optical system, which works at temperatures ranging from -40 °C to 60 °C, is designed by employing a cubic phase mask. Computer simulations and the first experimental demonstration are executed to verify the performance of this wavefront coded athermalized system and to clarify the issues related to its implementation.     

用双光收缩式径向剪切干涉仪测量气体温度场

为了适应大测试区的相位物体的测试研究和控制光学系统的成本,设计出双光收缩式径向剪切干涉光学系统。通过实验得到干涉条纹,用CCD摄入计算机,经Matlab编制傅里叶变换、相位去包裹和其他数值计算程序,解调干涉条纹的相位,计算出温度扰动产生的波面畸变量,它等于折射率变化引起的相位偏移值,用轴对称气体温度场重建方法,再现了气体温度场一个层面上的温度分布。实验结果与铜一康铜微型热电偶单点测温相比较,两者相差不大。实验表明该系统具有较高的精度和测试灵敏度,适于环境温差较小的相位物体热物理量的测量。