| 抑制高阶谐波误差的随机相移条纹分析算法 |
| |
| 引用本文： | 孙莉莉,徐建程,李勇.抑制高阶谐波误差的随机相移条纹分析算法[J].强激光与粒子束,2013,25(2):330-334. |
| |
| 作者姓名： | 孙莉莉 徐建程 李勇 |
| |
| 作者单位： | 1.浙江师范大学 信息光学研究所, 浙江 金华 321 004 |
| |
| 基金项目： | 浙江省自然科学基金项目(Y1110125)； 浙江师范大学创新团队项目 |
| |
| 摘 要： | 高阶谐波和随机相移误差是影响条纹分析精度的主要因素。为了同时解决这两个问题，提出了基于频域滤波的迭代相移算法。该算法采用巴特沃斯低通滤波器，从频域上滤除条纹的高阶谐波分量，再运用最小二乘迭代方法从三帧随机相移条纹图像中提取相位信息。数值模拟和实验结果表明,该算法可有效地抑制由高阶谐波和随机相移引入的波纹误差，误差PV值和RMS值分别为0.368 8 rad和0.025 3 rad，其精度高于传统的三步相移算法和Wang算法。该方法适合于高精度干涉测量和三维物体表面轮廓测量。
|
| 关 键 词： | 频域滤波 最小二乘迭代 随机相移 高阶谐波 |
| 收稿时间： | 2012/5/28 |
Analysis algorithm of randomly phase shifting fringes for reducing high order harmonic error |
| |
| Sun Lili,Xu Jiancheng,Li Yong.Analysis algorithm of randomly phase shifting fringes for reducing high order harmonic error[J].High Power Laser and Particle Beams,2013,25(2):330-334. |
| |
| Authors: | Sun Lili Xu Jiancheng Li Yong |
| |
| Affiliation: | 1.Institute of Information Optics,Zhejiang Normal University,Jinhua 321004,China |
| |
| Abstract: | High order harmonics and phase shift miscalibration are the two main systematic error sources that affect the accuracy of fringe analysis. To deal with these problems simultaneously, an iterative phase shifting algorithm based on frequency filtering is proposed. The proposed method filters the high order harmonics in spectrum domain by using the Butterworth low pass filter, and then extracts the phase from three frames of randomly phase shifting fringes by using the least squares iterative algorithm. Numerical simulation and experimental results show that the proposed method can effectively reduce the ripple caused by high order harmonics and randomly phase shifting error and thus can increase the measurement accuracy. The proposed algorithm is suitable for the high accuracy interferometry and three dimensional profilometry measurement. |
| |
| Keywords: | frequency filtering least squares iteration randomly phase shifting error high order harmonics |
| 本文献已被 CNKI 等数据库收录！ |
| 点击此处可从《强激光与粒子束》浏览原始摘要信息 |
|
点击此处可从《强激光与粒子束》下载全文 |
