| Analysis and Determination of Refractive Index Profiles of O^2＋ Ion-Implanted LiNbO3 Planar Waveguide Using Etching and Ellipsometry Techniques |
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| 引用本文： | 刘汉平,卢霏,王雪林,杨田林,吕英波,李延辉,刘祥志,张瑞锋,宋强,马学见.Analysis and Determination of Refractive Index Profiles of O^2＋ Ion-Implanted LiNbO3 Planar Waveguide Using Etching and Ellipsometry Techniques[J].中国物理快报,2008,25(1):156-159. |
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| 作者姓名： | 刘汉平 卢霏 王雪林 杨田林 吕英波 李延辉 刘祥志 张瑞锋 宋强 马学见 |
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| 作者单位： | [1]School of Information Science and Engineering, Shandong University, Jinan 250100 [2]School of Physics and Microelectronics, Shandong University, Jinan 250100 [3]Department of Space Science and Applied Physics, Shandong University, Weihai 264209 |
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| 基金项目： | Supported by the National Natural Science Foundation of China under Grant No 10735070. We would like to thank Professor Ke-Ming Wang at Shandong University for helpful discussion. We also thank Dr Hong-Ji Ma and Rui Nie at Peking University for their help in ion implantation. |
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| 摘 要： | The refractive index profiles of 3 MeV O^2＋ ion-implanted planar waveguides in lithium niobate are reconstructed based on etching and ellipsometry techniques. SRIM2003 code is used to simulate the damage distribution in waveguide. It is demonstrated that the index profile of this kind of waveguide, extending to several micrometres in depth, can be determined by etching in combination with following ellipsometric measurements. A good agreement is found between the simulated damage distributions in waveguide and the index profiles based on experimental data, and the width of refractive index barrier is wider than the result of SRIM2003.
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| 关 键 词： | 平面波导 铌酸锂 氧离子注入 折射率 测量方法 椭圆光度法 |
| 收稿时间： | 2007-10-18 |
Analysis and Determination of Refractive Index Profiles of O2+ Ion-Implanted LiNbO3 Planar Waveguide Using Etching and Ellipsometry Techniques |
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| LIU Han-Ping,LU Fei,WANG Xue-Lin,YANG Tian-Lin,LV Ying-Bo,LI Yan-Hui,LIU Xiang-Zhi,ZHANG Rui-Feng,SONG Qiang,MA Xue-Jian.Analysis and Determination of Refractive Index Profiles of O2+ Ion-Implanted LiNbO3 Planar Waveguide Using Etching and Ellipsometry Techniques[J].Chinese Physics Letters,2008,25(1):156-159. |
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| Authors: | LIU Han-Ping LU Fei WANG Xue-Lin YANG Tian-Lin LV Ying-Bo LI Yan-Hui LIU Xiang-Zhi ZHANG Rui-Feng SONG Qiang MA Xue-Jian |
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| Affiliation: | School of Information Science and Engineering, Shandong University, Jinan 250100School of Physics and Microelectronics, Shandong University, Jinan 250100Department of Space Science and Applied Physics, ShandongUniversity, Weihai 264209 |
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| Abstract: | The refractive index profiles of 3MeV O2+ ion-implanted planar waveguides in lithium niobate are reconstructed based on etching and ellipsometry techniques. SRIM2003 code is used to simulate the damage distribution in waveguide. It is demonstrated that the index profile of this kind of waveguide, extending to several micrometres in depth, can be determined byetching in combination with following ellipsometric measurements. A good agreement is found between the simulated damage distributions in waveguide and the index profiles based on experimental data, and thewidth of refractive index barrier is wider than the result of SRIM2003. |
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| Keywords: | 42 79 Gn 61 80 Jh 52 77 Bn 07 60 Fs |
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