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In this work, the influence of Si/SiO2 interface properties, interface nitridation and remote-plasma-assisted oxidation (RPAO) thickness (<1 nm), on electrical performance and TDDB characteristics of sub-2 nm stacked oxide/nitride gate dielectrics has been investigated using a constant voltage stress (CVS). It is demonstrated that interfacial plasma nitridation improves the breakdown and electrical characteristics. In the case of PMOSFETs stressed in accumulation, interface nitridation suppresses the hole traps at the Si/SiO2 interface evidenced by less negative Vt shifts. Interface nitridation also retards hole tunneling between the gate and drain, resulting in reduced off-state drain leakage. In addition, the RPAO thickness of stacked gate dielectrics shows a profound effect in device performance and TDDB reliability. Also, it is demonstrated that TDDB characteristics are improved for both PMOS and NMOS devices with the 0.6 nm-RPAO layer using Weibull analysis. The maximum operating voltage is projected to be improved by 0.3 V difference for a 10-year lifetime. However, physical breakdown mechanism and effective defect radius during stress appear to be independent of RPAO thickness from the observation of the Weibull slopes. A correlation between trap generation and dielectric thickness changes based on the C-V distortion and oxide thinning model is presented to clarify the trapping behavior in the RPAO and bulk nitride layer during CVS stress. 相似文献
34.
With the ever-increasing amount of generated waste governments around the world are looking for, and implementing, ways to minimize waste output and maximize waste recovery. The main difficulties are sorting waste items, identifying the different types of plastics, and the time taken to sort them manually. Bioplastics such as polylactic acid and Novatein thermoplastic protein can be incorporated into the recycling stream to minimize waste. Laser-induced breakdown spectroscopy spectra analyzed by k-nearest neighbor and soft independent modeling by class analogy were investigated as methods that can rapidly identify recyclables. Raw, peak normalized, and total intensity normalized spectra were used to identify which would improve classification. Laser-induced breakdown spectroscopy spectra were generated by single laser shots to different locations on nine samples, glass (brown, green, and clear), tin, aluminum, polylactic acid, Novatein, polyethylene terephthalate, and high-density polyethylene. To prove that the system has the potential to be used on a waste sorting stream an autofocus unit was developed to move the laser-induced breakdown spectroscopy beam into focus on the different sample geometries. Two classification methods were investigated, soft independent modeling by class analogy and the k-nearest neighbors algorithm. k-Nearest neighbors on raw spectra produced the best results. Discrimination between bioplastics and plastics were 100%. Glass samples could not be reliably distinguished from each other. Surface contamination produced three misclassifications from 450 spectra. Similar results were obtained when the spectral range was reduced from 182.26–908.07?nm to 313.20–495.12?nm. 相似文献
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运用声学基础理论,讨论了激光入射到液体中,激光能量与声信号强度间的变化关系.发现激光能量与声信号强度之间存在着对数线形关系.根据液体中光声信号的连续性,得到了一种求取液体光击穿阈值的新方法. 相似文献
37.
We report the formation of β′-Gd2(MoO4)3 (GMO) crystal on the surface of the 21.25Gd2O3-63.75MoO3-15B2O3 glass, induced by 250 kHz, 800 nm femtosecond laser irradiation. The morphology of the modified region in the glass was clearly examined by scanning electron microscopy (SEM). By micro-Raman spectra, the laser-induced crystals were confirmed to be GMO phases and it is found that these crystals have a strong dependence on the number and power of the femtosecond laser pulses. When the irradiation laser power was 900 mW, not only the Raman peaks of GMO crystals but also some new peaks at 214 cm−1, 240 cm−1, 466 cm−1, 664 cm−1 and 994 cm−1which belong to the MoO3 crystals were observed. The possible mechanisms are proposed to explain these phenomena. 相似文献
38.
The low energy effective scalar potential arising from the supergravity model proposed by Nilles, Srednicki and Wyler is minimized
exactly. Bounds are derived for the parameters of the theory from the requirement that SU(2) × U(1) be broken at the tree
level. These results support earlier approximate results. 相似文献
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High-voltage super-junction lateral double-diffused metal-oxide semiconductor with a partial lightly doped pillar 下载免费PDF全文
A novel super-junction lateral double-diffused metal-oxide semiconductor(SJ-LDMOS) with a partial lightly doped P pillar(PD) is proposed.Firstly,the reduction in the partial P pillar charges ensures the charge balance and suppresses the substrate-assisted depletion effect.Secondly,the new electric field peak produced by the P/P-junction modulates the surface electric field distribution.Both of these result in a high breakdown voltage(BV).In addition,due to the same conduction paths,the specific on-resistance(R on,sp) of the PD SJ-LDMOS is approximately identical to the conventional SJ-LDMOS.Simulation results indicate that the average value of the surface lateral electric field of the PD SJ-LDMOS reaches 20V/μm at a 15μm drift length,resulting in a BV of 300V. 相似文献
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探索提高金属表面真空击穿阈值的方法,对脉冲功率技术的发展和应用具有重要意义。在金属表面电子发射理论分析的基础上,采用有限元法计算阴极杆表面电场随二极管电压的变化规律,设计了实验系统,并开展了实验研究。实验对比了在脉宽约30 ns、阴极杆与阳极筒间隙12 mm时,钛合金TC4阴极杆在不同种类高分子膜(膜厚30~60 μm)下真空击穿阈值的变化情况。在表面粗糙度Rz(轮廓最大高度)为0.8 μm的TC4阴极杆表面分别镀环氧树脂膜和丙烯酸膜,实验结果表明,镀丙烯酸膜阴极杆的击穿阈值约505 kV/cm,相对于不镀膜阴极杆,击穿场强提高了约20.6%;在表面粗糙度Rz为0.2 μm的TC4阴极杆表面分别镀聚酰亚胺膜和聚醚醚酮膜,实验结果表明,镀聚酰亚胺膜阴极杆的击穿阈值为584 kV/cm,相对于不镀膜阴极杆,击穿场强提高了约28.1%。因此,在金属表面镀丙烯酸膜、聚酰亚胺膜可以有效提高金属表面的真空击穿阈值。 相似文献