采用显微拉曼光谱技术检测激光微加工质量

本文简要介绍了准分子激光微加工的原理;分析比较了几种微检测技术的特点和用途;提出了采用显微拉曼光谱检测准分子激光微加工质量的新技术,并在有机玻璃和光刻胶制成的齿轮上分别进行了探索。研究结果表明:显微拉曼散射技术确实可以成为一种新的检测微加工质量的有效手段。     

The investigation of microsystems using Raman spectroscopy

This paper discusses the use of Raman spectroscopy to study the functioning and reliability of microsystems. It is shown that Raman spectroscopy has several potential applications for this study, such as identification of materials, study of their crystallinity, uniformity and composition, and measurement of local temperature and stress. Especially for the latter the technique has unique features: it is non-destructive, it has a good spatial resolution (better than 1 μm), and it allows two-dimensional imaging of the stress distribution in some materials. Examples are given for micro-electromechanical systems and packages.     

New techniques for laser microprocessing of photovoltaic devices based on thin-film a-Si:H

Laser-controlled ablation of individual layers in glass/TCO/thin-film silicon/metal structures is essential for cell isolation and monolithic interconnection in thin-film silicon photovoltaic technologies. More recently, the potential application of laser scribing techniques for the development of photovoltaic matrix position sensors based on a-Si:H has generated much activity, requiring an excellent control in laser-generated patterns obtained by direct material ablation.This work is aimed to determine process parametric windows for a-Si:H thin-film ablation processes using UV ns laser sources in thin-film a-Si:H-based devices. The study is focussed on direct writing techniques using UV sources. We present ablation threshold measurements and process quality assessment using advanced optical microscopy techniques. Moreover only fully commercial laser sources in the ns regime has been used, bearing in mind that thin film based photovoltaic technologies are still demanding further reduction in production costs and, nowadays, ultrafast sources are beyond their scope both for the investment and running cost of those equipments.     

Characterization of Kovar-to-Kovar laser welded joints and its mechanical strength

For the packaging of a pump laser in butterfly package, the most crucial assembly step is the fiber-to-laser diode coupling and attachment. The use of laser welding as the joining method offers several advantages if compared with the adhesive joints: strong joining strength, short process time and less contamination. This paper reports on laser welding process characteristics; weld strength and its fracture mode. The penetration depth and melt area of laser spot welds were found to be complicated functions of laser pulse energy, intensity, and beam diameter. Effects of pulse width, input power and size of the focal spot on the rate of energy input to the workpieces and consequently, the weld strength were reported. The weld strength was found to be dependent on the overlapping area between the two joining materials. Surface roughness, R_a, has influence on the fraction of energy absorbed, A, and therefore, affecting the penetration depth. Thermal analysis was carried out on the laser-welded joints and its heat-affected zone (HAZ) induced by various power densities was examined. These data are important in order to optimize and utilize the laser welding process as an effective manufacturing tool for fabrication of reliable pump laser.     

基于微拉曼光谱技术的氧化介孔硅热导率研究

利用基于有效介质理论的介孔硅传热机理，提出一个用于分析氧化介孔硅热导率的理论模型，对影响氧化介孔硅有效热导率的因素进行了理论分析，得出用于计算氧化介孔硅有效热导率的计算公式. 采用双槽电化学腐蚀法制备介孔硅，利用微拉曼光谱技术研究了氧化介孔硅热导率随所制备介孔硅孔隙率的变化规律，比较了经不同温度处理的氧化介孔硅的导热性能差异. 孔隙率为60%，73.4%和78.8%的所制备介孔硅经300℃氧化处理后，其热导率值为8.625W/(m·K)，3.846W/(m·K)和1.817W/(m·K)；孔隙率为73.4     

基于微拉曼光谱技术的氧化介孔硅热导率研究

利用基于有效介质理论的介孔硅传热机理,提出一个用于分析氧化介孔硅热导率的理论模型,对影响氧化介孔硅有效热导率的因素进行了理论分析,得出用于计算氧化介孔硅有效热导率的计算公式. 采用双槽电化学腐蚀法制备介孔硅,利用微拉曼光谱技术研究了氧化介孔硅热导率随所制备介孔硅孔隙率的变化规律,比较了经不同温度处理的氧化介孔硅的导热性能差异. 孔隙率为60%,73.4%和78.8%的所制备介孔硅经300℃氧化处理后,其热导率值为8.625W/(m·K),3.846W/(m·K)和1.817W/(m·K);孔隙率为73.4 关键词： 理论模型 氧化介孔硅 微拉曼光谱 有效热导率     

Multi-level relief structures in sol-gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy

The demand in the field of microtechnology to create multi-level structures with sufficient resolution has been growing in recent years, particularly in micro-optics. Using the well-known laser ablation technique, the behaviour of different hybrid organic/inorganic homemade sol-gel materials and of a standard commercial photoresist are investigated with a KrF laser emitting at 248 nm with nanosecond pulses. The aim consists of rapidly transferring relief patterns at low cost. The experimental set-up and procedure combined with the versatile profilometry technique of coherence probe microscopy (CPM) for rapid analysis are presented; the fabrication issues are discussed and compared with ablation of quartz and polymers. The materials calibration curves, which demonstrate the achievement of the present work, are presented.     

飞秒激光在空气和水中对硅片烧蚀加工的实验研究

采用1 kHz,800 nm,50 fs—24 ps的钛宝石激光脉冲对单晶硅样品在空气和水溶液环境中的烧蚀加工特性进行了研究.实验观察到了超短脉冲激光在空气氛围中烧蚀形成的双层环状结构,分析揭示了加工区域中心和边缘的烧蚀物理机制分别为热熔化和库仑爆炸,并测量了双层环状结构半径随入射激光能量、脉冲数及持续时间等的变化关系,结果表明获取较大深-宽比的加工效果需选择小能量脉冲激光的多次作用.在水溶液环境中,实验发现飞秒激光在样品表面诱导产生了亚微米量级的多孔状结构,而皮秒激光则更容易实现对硅表面的非热性去除.这是由于激光诱导的光机械应力和空泡效应随脉冲宽度变大而增强所致,在实验上确立了区分这两种不同加工状态的临界脉冲宽度. 关键词： 飞秒激光 硅片 激光加工     

Effect of energy above laser-induced damage thresholds in the micromachining of silicon by femtosecond pulse laser

A 400 nm second harmonic Ti : sapphire femtosecond laser was applied to structure silicon base on a direct-write process in air. A series of lines were ablated with pulses of 300-fs duration at varying power densities ranging from 50 to 100 nJ of energy on 2″ silicon (1 1 1) wafers. In this event, we investigate and report extensive laser induced thermal damage and redeposition encompassing the ablated lines at high energy levels above the damage threshold of the silicon. In addition, the effect of polarisation on the direction of micromachining is also observed and discussed. The resolution and quality of these lines were also found to hold a linear relationship to the laser energy up to its thermal threshold limit.     

激光波长对水中金属元素激光诱导击穿光谱探测的影响

针对激光诱导击穿光谱(LIBS)在海洋应用中的问题,对1 064和532nm两个激发波长下水中LIBS光谱特性进行探测分析,以比较其烧蚀效果。通过激光诱导等离子体的时间分辨光谱,分析水下等离子体电子密度随时间的演化规律,1 064nm激光诱导等离子体寿命约为1 200ns,而532nm激光激发情况下等离子体寿命仅约为600ns。基于光在水中的传输特性和LIBS的实验结果,建立了获得最佳LIBS探测效果所需的入水前激光脉冲能量Eiopt(r)与探测距离r的关系,并应用到水下原位探测的模拟分析。结果表明,当探测距离不大于5cm时,所需的入水前1 064nm激光单脉冲能量小于100mJ,该激发波长可用于LIBS的水下探测;当探测距离增至10cm时,所需的入水前532nm激光单脉冲能量只需30mJ左右。因此,当原位探测距离增加时,则需考虑选择532nm激光作为烧蚀光源。     

Analysis of materials modifications caused by UV laser micro drilling of via holes in AlGaN/GaN transistors on SiC

Pulsed UV laser drilling can be applied to fabricate vertical electrical interconnects (vias) for AlGaN/GaN high electron mobility transistor devices on single-crystalline silicon carbide (SiC) substrate. Through-wafer micro holes with a diameter of 50-100 μm were formed in 400 μm thick bulk 4H-SiC by a frequency-tripled solid-state laser (355 nm) with a pulse width of ≤30 ns and a focal spot size of ∼15 μm. The impact of laser machining on the material system in the vicinity of micro holes was investigated by means of micro-Raman spectroscopy and transmission electron microscopy. After removing the loosely deposited debris by etching in buffered hydrofluoric acid, a layer of <4 μm resolidified material remains at the side walls of the holes. The thickness of the resolidified layer depends on the vertical distance to the hole entry as observed by scanning electron microscopy. Micro-Raman spectra indicate a change of internal strain due to laser drilling and evidence the formation of nanocrystalline silicon (Si). Microstructure analysis of the vias’ side walls using cross sectional TEM reveals altered degree of crystallinity in SiC. Layers of heavily disturbed SiC, and nanocrystalline Si are formed by laser irradiation. The layers are separated by 50-100 nm thick interface regions. No evidence of extended defects, micro cracking or crystal damage was found beneath the resolidified layer. The precision of UV laser micro ablation of SiC using nanosecond pulses is not limited by laser-induced extended crystal defects.     

An investigation of pulsed laser cutting of titanium alloy sheet

Subsequent welding requirement calls for high-quality laser cut surfaces in the laser cutting of bladed ring parts for aeroengines. This paper presents pulsed laser cutting of titanium alloy sheet and investigates the influences of laser cutting parameters on laser cut quality factors including heat-affected zone (HAZ), surface morphology and corrosion resistance. The thickness of HAZ lasers is studied in detail as a function of laser cutting parameters. For different assist gases the surface morphology and corrosion resistance show great differences. In comparison with air- and nitrogen-assisted laser cutting, argon-assisted laser cutting comes with unaffected surface quality and is suitable for laser cutting with subsequent welding requirement.     

Analysis of laser drilled deep holes in stainless steel by superposed pulsed Nd:YAG laser radiation

Deep drilling of through holes in stainless steel (1.4301, sample thicknesses 5, 8 and 10 mm) has been performed with the superposed radiation of two pulsed Nd:YAG lasers with pulse duration of 0.5 ms superposed by 17 ns pulses. The drilling efficiency is improved by the spatially and temporally superposed radiation of the two lasers. The enhanced drilling speed and the larger reproducibility of the drilling time are explained by a modified formation of closures in the hole during percussion drilling which are recorded by high-speed photography. The metallographic hole analysis exhibits high-temperature oxidation marks. The development of these marks is described by a ray tracing of the incident beam within the hole and the resulting intensity distribution at the hole wall.     

A study of the shielding gas influence on the laser beam welding of AA5083 aluminium alloys by in-process spectroscopic investigation

In laser welding, the shielding gas is commonly used to stabilize the welding process, to improve welded joints features and to protect the welded seam against oxidization. Besides the type of shielding gas used, the nozzle parameters play an essential role. In fact, the chemical composition of the shielding gas and the flow geometry are key factors limiting the size of the plasma plume and its contamination by the surrounding atmosphere, and affecting the final quality of the welded joints.In this work, we present an experimental study on the complex physical phenomena occurring during the interaction between the plasma plume, the laser beam and the shielding gas by using an in-process spectroscopic investigation of the plasma plume characteristics under different operating conditions. A correlation was found between the spectral features and the formation of oxide layers on the surface of the welding seam, caused by defective gas shielding and by the vaporization of alloying elements. Experimental results have given useful indications for the development of innovative welding nozzle for application in laser welding of aluminium alloys.     

固体热容激光器与热稳态固体激光器温度场和应力场的比较研究

 建立了3维温度场及应力场模型,并采用有限元分析方法对Nd:YAG作为激活介质的固体热容激光器与热稳态固体激光器进行了对比研究。激光二极管阵列距离晶体3.5 mm,阵列功率2×4.2 kW,bar间隔0.4 mm,每bar发光面积为1 μm×5 mm,频率100 Hz,脉宽100 μs,Nd:YAG晶体初始温度20 ℃,冷却水温20 ℃。计算结果表明：热容模式激光介质的表面温度高于中心温度,稳态模式刚好相反, 稳态模式温差极值（19.8 ℃）是热容模式(6.4 ℃)的3.1倍,温度梯度极值(11.9 ℃/mm)是热容模式(2.46 ℃/mm)的4.8倍,热流密度极值(0.136 W/mm²)是热容模式(0.021 W/mm²))的6.4倍;稳态模式激光介质的表面出现张应力,中心出现压应力,热容模式则刚好相反,稳态模式压应力极值(18.27 MPa)是热容模式(12.1 MPa)的1.5倍,张应力极值(38.39 MPa)是热容模式(10.3 MPa)的3.9倍。由于晶体可以承受的压应力的破坏阈值远高于张应力,所以热容模式的固体激光器比稳态模式的固体激光器可以工作在更高的泵浦功率水平上。     

Finite element simulation of laser tube bending: Effect of scanning schemes on bending angle, distortions and stress distribution

Laser forming has received considerable attention in recent years. Within laser forming, tube bending is an important industrial activity, with applications in critical engineering systems like micro-machines, heat exchangers, hydraulic systems, boilers, etc. Laser tube bending utilizes the thermal stresses generated during laser scanning to achieve the desired bends. The parameters to control the process are usually laser power, beam diameter, scanning velocity and number of scans. Recently axial scanning has been used for tube bending instead of commonly used circumferential scans. However the comparison between the scanning schemes has involved dissimilar laser beam geometries with circular beam used for circumferential scanning and a rectangular beam for the axial scan. Thermal stresses generated during laser scanning are strongly dependent upon laser beam geometry and scanning direction and hence it is difficult to isolate the contribution made by these two variables. It has recently been established at the Corrosion and Protection Centre, University of Manchester, that corrosion properties of material during laser forming are affected by the number of laser passes. Depending on the material, the corrosion behaviour is either adversely or favourably affected by number of passes. Thus it is of great importance to know how different scanning schemes would affect laser tube bending. Moreover, any scanning scheme which results in greater bending angle would eliminate the need for higher number of passes, making the process faster. However, it is not only the bending angle which is critical, distortions in other planes are also extremely important. Depending on the use of the final product, unwanted distortions may be the final selection criteria. This paper investigates the effect of scanning direction on laser tube bending. Finite-element modelling has been used for the study of the process with some results also validated by experiments.     

Fine structure in the time of flight distribution of C2 in laser produced plasma from graphite

Time resolved optical emission spectroscopy is employed to study the expansion dynamics of C₂ species in a graphite plasma produced during the Nd : YAG ablation. At low laser fluences a single peak distribution with low kinetic energy is observed. At higher fluences a twin peak distribution is found. It has been noted that these double peak time of flight distribution splits into a triple peak structure at distances ≥17mm from the target surface. The reason for the occurrence of multiple peak is due to different formation mechanisms of C₂ species.     

Formation of periodic structures by laser ablation of metals in liquids

Experimental results are presented on ablation of metals (W, Cu, brass and bronze) in a liquid environment (e.g., ethanol or water) by irradiation with either a pulsed copper vapor laser (0.51 μm) or a pulsed Nd:YAG laser (1.06 μm). The target material is ejected into surrounding liquid in the form of nanoparticles. In a certain range of laser parameters (fluence and number of laser shots) the surface of the solid target is composed of micro-cones having a regular structure. The distance between neighboring micro-cones in the structure depends on the laser spot size. The structures allow the observation of up-conversion of the laser frequency due to generation of the second harmonics in the eye retina.     

Spatial and time resolved analysis of CN bands in the laser induced plasma from graphite

Analysis of the emission bands of the CN molecules in the plasma generated from a graphite target irradiated with 1.06 μm radiation pulses from a Q-switched Nd:YAG laser has been done. Depending on the position of the sampled volume of the plasma plume, the intensity distribution in the emission spectra is found to change drastically. The vibrational temperature and population distribution in the different vibrational levels have been studied as function of distance from the target for different time delays with respect to the incidence of the laser pulse. The translational temperature calculated from time of flight is found to be higher than the observed vibrational temperature for CN molecules and the reason for this is explained.     

The production and oxidation of uranium nanoparticles produced via pulsed laser ablation

Depleted uranium samples were ablated using five nanosecond pulses from a Nd:YAG laser and produced films of ∼1600 Å thickness that were deposited with an angular distribution typical of a completely thermal ablation (cos¹ θ). The films remained contiguous for many months in vacuum but blistered due to tensile stress induced in the films several days after being brought into air. While under vacuum (2 × 10⁻¹⁰ Torr base pressure) the films were allowed to oxidize from the residual gases, of which water vapor was found to be the primary oxidizer. During the oxidation, the samples were monitored with both X-ray and ultraviolet photoemission spectroscopy (XPS and UPS) and were found to oxidize following Langmuir kinetics. That a 2D-surface growth model described the oxidation indicates that, even at these low pressures, oxygen accumulation on the surface is a much faster process than diffusion into the bulk. While bulk diffusion did occur, the oxygen present at the surface saturated the measurements taken using photoemission and diffusion was difficult to observe. A method for determining oxide concentration via photoemission from the valence level, as opposed to the more conventional core levels, is also presented.