嵌入式三色光变器

为了提升现有导模共振防伪光变器件的性能,设计了一种基于ZnS覆盖膜的一维单周期矩形结构三色光变器.当自然光入射角为45°时,可在0°,58°,90°方位角分别获得相应的蓝、绿、红三色反射峰,对研究结果进行了物理解释.分析并提出了该器件周期、槽深、膜厚以及入射角变化对反射峰的影响规律,对器件的设计、制作和测试有重要指导作用.三色光变器基于简单结构实现方位角调节的自然光三色光变效果,可运用传统激光全息产业的模压和蒸镀工艺进行制作,在光变图像防伪领域有重要应用.     

在分光计上做双棱镜干涉实验

提出在分光计上做双棱镜干涉实验的实验方法,并论述了该方法的实验原理,给出了测量光波波长的公式.该方法克服了在光具座上进行实验时的调节难度大、不易测量和测量误差大等问题.     

有限口径非周期亚波长衍射聚焦偏转器的严格矢量优化

有限口径非周期亚波长衍射光学器件的亚波长结构特性使得传统标量衍射理论失效,必须借助严格电磁理论进行器件的设计。提出一种循环平面波谱算法(IterativePlaneWaveSpectrumAlgorithm,IPWSA)作为器件优化算法,利用二维时域有限差分方法作为严格电磁计算模式,根据Farn方法对器件面型进行亚波长处理,设计出有限口径非周期具有亚波长结构的衍射聚焦偏转器件,偏转角为24.8°,该器件可与激光器集成构成微型集成光学系统,也可以用在红外量子阱系统中。详细分析了算法原理,设计实例验证了算法的优化效果。     

混合型双光束干涉全息照相的设计与探究

基于单光束干涉和一般的双光束干涉全息照相实验,本文设计了一种反射透射混合型双光束干涉光路,从理论上分析了两束物光与一束参考光干涉叠加后在全息干板上的强度分布情况,通过对照实验：拍摄只有反射物光的单光束干涉光路、只有透射物光的单光束干涉光路、反射透射混合型双光束干涉光路的全息图,对比分析成像效果,结果表明本文设计的光路拍摄得到的全息图成像更完整、更清晰、层次感更强;并进一步通过控制变量法,改变不同的影响因素,进而提高全息图的成像质量。经过多次探究,结果表明,当使用GS-I型全息干板,使用功率约为2.23mW、波长为632.8nm的氦氖激光器拍摄全息图时,控制曝光时间为15s,反射物光与参考光之间的夹角为25°～35°,透射物光与参考光之间的夹角为20°～30°,反射物光、透射物光与参考光的光强比约为1∶1∶1,全息图整体成像效果最佳。     

双曝光全息干涉法用于风洞中激波流场的研究

本文论述了双曝光全息干涉法在激波流场研究中的应用．对于形状不规则模型在超音速风洞中产生的激波流场,由于对这种流场进行数值计算几乎不可能,从实验上对其进行定量测量就显得尤为重要．本文很好地解决了某种不规则模型超音速激波流场的定量测量问题,获得了激波流场的有限条纹全息干涉图,并利用图象处理技术对干涉图进行了细化处理,再用人机交互的方式采集数据计算出条纹的位移量,最后用拉普拉斯变换法计算出流场的密度分布值．     

金属薄膜亚波长微结构的光束集束器件设计

利用时域有限差分方法,模拟了P偏振光高斯光束入射到金属银亚波长细缝与光栅结构的透射情况.由于表面等离子激元波的影响,对称光栅结构透射光呈现对称出射,而非对称结构可以实现小角度定方向的光束集束现象.借助公式推导法及Helmholtz互易定理,可设计出平行入射P偏振光的光束集束器件.由于高斯光束本身的发散性及近场分布的需要,针对高斯光束的器件在结构参量上缩小了12%.在对其他结构参量的优化的基础上,实现了针对633 nm高斯光束的对称出射及光束集束器件的设计.     

闪耀型亚波长光栅透镜的柱矢量光聚焦优化和调控

柱矢量光束的紧聚焦在光学微操纵、光学存储、激光微加工、超分辨率成像和粒子加速等领域发挥着重要作用。亚波长光栅平凹透镜对柱矢量光束的紧聚焦的能力仍有提升空间,本文利用闪耀结构将光的能量从零级转移并集中到-1级,对亚波长光栅平凹透镜的聚焦性能进行优化。提高了透镜的衍射效率,增强了焦场的能量。通过调整高斯径向偏振光的形状参数,改变入射光振幅及入射区域半径实现对焦场能量的动态调控。进一步地,调控柱矢量光束的偏振组分能够直接有效地横向调制焦场,获得多样化形貌的焦斑。本文的优化手段对于其他光栅透镜也具有参考意义,该研究结果在超分辨率成像以及光场调控等领域具有潜在的应用价值。     

基于导模共振效应三基色窄带滤光片的研究

为获得性能优良的三基色窄带滤光片,提出了一种基于减反射薄膜波导光栅结构的导模共振滤光片.该滤光片由亚波长光栅结构、波导层和基底组成.采用严格耦合波理论分析了亚波长光栅结构和波导层厚度对导模共振滤光片反射光谱性能的影响.数值分析表明λ/4-λ/2-λ/4结构能有效提高导模共振滤光片的性能.当光栅结构位于基底侧时,红绿蓝三...     

深度学习的亚波长窄带陷波滤光片设计

亚波长光栅结构表现出优异的陷波滤光特性,其经典设计是设定亚波长的几何结构参数,求解麦克斯韦方程组,设定优化算法求解出最优解,需要消耗大量的时间和计算资源.提出一种基于深度学习的逆向设计方法,搭建了可以同时实现正向模拟与逆向设计的串联神经网络.基于python语言的Tensorflow库进行网络搭建;优化均匀波导层的高度...     

多光束激光干涉光刻图样

利用电磁理论,研究了多光束激光干涉图样的产生原理,结合计算机数值模拟和相关实验结果,分析了干涉图样的影响因素。研究结果表明：多光束激光干涉图样可以看成是多组余弦分布的平行线条纹的叠加;相干光束的偏振方向、入射方向、光束间相差是干涉图样的重要影响因素,改变这些因素,余弦分布的平行线条纹的振幅、置、周期和方向发生变化,图样也随之变化。     

Research of photolithography technology based on surface plasmon

This paper demonstrates a new process of the photolithography technology,used to fabricate simply fine patterns,by employing surface plasmon character.The sub-wavelength periodic silica structures with uniform silver film are used as the exposure mask.According to the traditional semiconductor process,the grating structures are fabricated at exposing wavelength of 436 nm.At the same time,it provides additional and quantitative support of this technique based on the finite-difference time-domain method.The results of the research show that surface plasmon characteristics of metals can be used to increase the optical field energy distribution differences through the silica structures with silver film,which directly impact on the exposure of following photosensitive layer in different regions.     

Theoretical study of micro-optical structure fabrication based on sample rotation and two-laser-beam interference

A method for fabricating a micro-optical structure based on sample rotation and two-laser-beam interference is proposed. The rotation process is analyzed using the coordinate transformation in matrix presentation and the theoretical expressions of the optical field distributions corresponding to different sample rotations. By rotating the samples and changing the laser wavelength, various special micro-optical structures can be obtained, such as equally spaced concentric rings and irregular trapezoidal lattices; these structures are demonstrated by simulating the corresponding optical field distributions. The proposed approach may be developed into a low-cost laser interference lithography technology for the fabrication of various micro-optical structures.     

Theoretical investigation of hierarchical sub-wavelength photonic structures fabricated using high-order waveguide-mode interference lithograph

This paper presents the theoretical investigation of hierarchical sub-wavelength photonic structures with various periods and numbers of layers, which were fabricated using a high-order waveguide-mode interference field. A 442-nm laser was used to excite high-order waveguide modes in an asymmetric metal-cladding dielectric waveguide structure. The dispersion curve of the waveguide modes was theoretically analyzed, and the distribution of the interference field of high-order waveguide modes was numerically simulated using the finite-element method. The various dependences of the characteristics of hierarchical sub-wavelength photonic structures on the thickness and refractive index of the photoresist and the waveguide mode were investigated in detail. These hierarchical sub-wavelength photonic structures have various periods and numbers of layers and can be fabricated by a simple and low-cost method.     

光的干涉衍射综合实验仪

根据传统的光的干涉衍射实验装置存在的不足,研制出了光的干涉衍射综合实验仪．将光学元件放置在同一小型光学平台上,按照实验需要组合成相应仪器．该实验仪既可以用于光学演示实验,也可以作为光学专用的实验仪器。     

Solid-state dye laser with moiré gratings

We fabricated distributed-feedback (DFB) solid-state dye lasers with moiré gratings. We formed a moiré grating pattern by superimposing two grating patterns with a rotation angle. The moiré gratings were fabricated by an “etchless” process utilizing a two-beam interference method. The gratings were coated with solidified rhodamine-B. The five laser devices were pumped with the second harmonic generation of a Nd:YAG laser and we obtained narrow-banded laser oscillations at 590, 600, 610, 620, and 630 nm wavelength. Full widths at half maximum of laser spectra were less than 0.5 nm. The results indicated that a moiré fringe can function as a resonator of DFB solid-state dye lasers.     

Infrared photoluminescence of erbium-tris(8-hydroxyquinoline) in a distributed feedback cavity

A distributed feedback (DFB) waveguide cavity with erbium-tris(8-hydroxyquinoline) has been fabricated by X-ray interference lithography in a laboratory-scale apparatus. The DFB cavity consists of a large area () one-dimensional grating of polymethylmethacrylate on Si (1 0 0). Structural, morphological and optical properties of the device have been studied. On-grating narrowing of the photoluminescence emission has been observed for the 492 nm grating period in correspondence to the 4f-4f Er band peak (at 1530 nm), indicating the possibility of optical gain for applications in the telecommunications.     

双尺度织构的激光光刻工艺

搭建了双光束激光干涉光刻系统和激光快速扫描系统。利用干涉光刻系统,实现了不同周期、不同深度、大面积的表面规则光栅织构的构筑。利用激光快速扫描器的二维扫描功能,通过控制激光功率和扫描速度,对曝光量和填充线条间距进行了优化。提出了两种双尺度复合织构的制备方法：一种是在激光快速扫描系统中对抗蚀剂表面分别进行x, y方向的扫描光刻,然后在干涉光刻系统中进行双光束干涉光刻;另一种是在激光干涉光刻系统中进行两次曝光,每次曝光的入射角不同。实验结果表明：这两种方法在制备双尺度复合织构方面具有快速、廉价、操作简易等优点。     

一种简单高效的制备硅纳米孔阵结构的方法

本文介绍了一种简单高效的制备硅纳米孔阵结构的方法. 利用激光干涉光刻技术, 结合干法和湿法刻蚀工艺, 直接将光刻胶点阵刻蚀为硅纳米孔阵结构, 省去了图形反转工艺中的金属蒸镀和光刻胶剥离等必要步骤, 在2英寸的硅 (001) 衬底上制备了高度有序的二维纳米孔阵结构. 利用干法刻蚀产生的氟碳有机聚合物作为湿法刻蚀的掩膜, 以及在干法刻蚀时对样品进行轻微的过刻蚀, 使SiO₂点阵图形下形成一层很薄的硅台面, 是本方法的两个关键工艺步骤. 扫描电子显微镜图片结果表明制备的孔阵图形大小均匀, 尺寸可控, 孔阵周期为450 nm, 方孔大小为200–280 nm. 关键词： 激光干涉光刻 纳米阵列 刻蚀 氟碳有机聚合物