CMOS compatible highly efficient grating couplers with a stair-step blaze profile

A novel grating coupler with a stair-step blaze profile is proposed.The coupler is a CMOS process compatible device and can be used for light coupling in optical communication.The blaze profile can be optimized to obtain a high efficiency of 66.7% for the out-of-plane coupling at the centre wavelength of 1595 nm with a 1 dB bandwidth of 41 nm.Five key parameters of the stair-step blaze grating and their effects on the coupling are discussed for the application in L band telecommunication.     

New CMOS compatible super junction LDMOST with n-type buried layer

A new super-junction lateral double diffused MOSFET (LDMOST) structure is designed with n-type charge compensation layer embedded in the p$^{ - }$-substrate near the drain to suppress substrate-assisted depletion effect that results from the compensating charges imbalance between the pillars in the n-type buried layer. A high electric field peak is introduced in the surface by the pn junction between the p$^{ - }$-substrate and n-type buried layer, which given rise to a more uniform surface electric field distribution by modulation effect. The effect of reduced bulk field (REBULF) is introduced to improve the vertical breakdown voltage by reducing the high bulk electric field around the drain. The new structure features high breakdown voltage, low on-resistance and charges balance in the drift region due to n-type buried layer.     

Modeling of nonlinear ultrasound propagation in tissue from array transducers

A computationally efficient model capable of simulating finite-amplitude ultrasound beam propagation in water and in tissue from phased linear arrays and other transducers of arbitrary quasiplanar geometry is described. It is based on a second-order operator splitting approach [Tavakkoli et al., J. Acoust. Soc. Am. 104, 2061-2072 (1998)], with a fractional step-marching scheme, whereby the effects of diffraction, attenuation, and nonlinearity can be computed independently over incremental steps. This approach is an extension to that of Christopher and Parker [J. Acoust. Soc. Am. 90, 507-521; 90, 488-499 (1991)], wherein linear and nonlinear effects are propagated separately over incremental steps, and the computation of the diffractive substeps are based on an angular spectrum technique with a modified sampling scheme for accurate and efficient implementation of diffractive propagation from nonradially symmetric sources. Results of the model are compared with published data. Predicted field profiles for nonlinear propagation in tissue from realistic array transducers using the pulse inversion method are presented.     

Assessing the relationship between the inter-rod coupling and the efficiency of piezocomposite high-intensity focused ultrasound transducers

The electroacoustic conversion efficiency of the ultrasonic transducer is a critical performance index for high-power applications. The material properties, volume fraction (VF) and aspect ratio (AR) are typically regarded as the design parameters of the piezocomposite transducer. We hypothesized that the spacing between piezoelectric rods was also a dominant factor. Therefore, the inter-rod coupling effects on the efficiency of 1–3 piezocomposite ultrasonic transducers were investigated in this study. The efficiencies of six flat and three curved 1.0 MHz PZT4 epoxy composite transducers with different geometric parameters were measured. Finite element transient analyses of the inter-rod electrical-mechanical coupling in the composites were carried out to explain the measured results. The experimental results showed that for 0.47 AR, the 79% VF transducers had lower efficiency than the 64% VF and 53% VF transducers. For 0.19 AR, the efficiency of the 59% VF transducer was not greater than the efficiency of the 39% VF transducer. Numerical analyses demonstrated that the positive peak voltage induced by the coupling of the side rods was more than twice the level induced by the coupling of the diagonal rods for any spacing. The diagonal coupling voltage peak did not change for spacings larger than 0.2 mm. Moreover, for spacings of 0.05 and 0.1 mm, the inter-rod coupling caused 24% and 20% waveform shifts of the driving voltage, respectively, while the 0.2 mm spacing coupling caused a 14% reduction in the amplitude of the driving voltage. As a result, the asymmetry of the driving voltage degraded the efficiency of the composite transducers and became more severe when the spacing was decreased. We concluded that the efficiency loss induced by inter-rod coupling as a function of spacing should be considered when designing piezocomposite transducers.     

Design of a flotation cell equipped with ultrasound transducers to enhance coal flotation

Ultrasonic treatment is widely used for surface cleaning during physical, chemical and physico-chemical processes in mineral processing. Several research papers and a few industrial applications about the subject suggest that the mechanism behind the positive effect of ultrasound for mineral processing and especially flotation is due to formation of cavitation by ultrasonic energy. Within this study, coal floatability is investigated by use of a specially designed flotation cell equipped with ultrasound transducers with different power, frequency and geometry. The results indicate that ultrasonic treatment during coal flotation positively affects the quality and quantity of the properties of floated coals while using of lesser amounts of reagent than a conventional flotation system.     

High performance infrared detectors compatible with CMOS-circuit process

A type of Si-based blocked impurity band photoelectric detector with a planar architecture is designed and demonstrated by a modified silicon semiconductor processing technique. In this route, multiple ion implantation is utilized to ensure the uniform distribution of the P elements in silicon, and rapid thermal annealing treatment is used to activate the P atoms and reduce damages caused by ion-implantation. The fabricated prototype device exhibits an excellent photoelectric response performance. With a direct current(DC) bias voltage of-2.3 V, the device detectivity to blackbody irradiation is as high as 5×10~(13) cm·Hz~(1/2)/W, which corresponds to a device responsivity of nearly 4.6 A/W, showing their potential applications in infrared detection, infrared astrophysics, and extraterrestrial life science. In particular, the developed device preparation process is compatible with that for the CMOS-circuit, which greatly reduces the manufacturing cost.     

Analysis of 2-D motion tracking in ultrasound with dual transducers

We study displacement and strain measurement error of dual transducers (two linear arrays, aligned orthogonally and coplanar). Displacements along the beam of each transducer are used to obtain measurements in two-dimensions. Simulations (5 MHz) and experiments (10 MHz) are compared to measurements with a single linear array, with and without angular compounding. Translation simulations demonstrate factors of 1.07 larger and 8.0 smaller biases in the axial and lateral directions respectively, for dual transducers compared to angular compounding. As the angle between dual transducers decreases from 90° to 40°, for 1% compression simulations, the lateral RMS error ranges from 2.1 to 3.9 μm compared to 9 μm with angular compounding. Simulation of dual transducer misalignment of 1 mm and 2° result in errors of less than 9 μm. Experiments demonstrate factors of 3.0 and 5.2 lower biases for dual transducers in the axial and lateral directions respectively compared to angular compounding.     

Acoustic power calibration of high-intensity focused ultrasound transducers using a radiation force technique

To address the challenges associated with measuring the ultrasonic power from high-intensity focused ultrasound transducers via radiation force, a technique based on pulsed measurements was developed and analyzed. Two focused ultrasound transducers were characterized in terms of an effective duty factor, which was then used to calculate the power during the pulse at high applied power levels. Two absorbing target designs were used, and both gave comparable results and displayed no damage and minimal temperature rise if placed near the transducer and away from the focus. The method yielded reproducible results up to the maximum pulse power generated of approximately 230 W, thus allowing the radiated power to be calibrated in terms of the peak-to-peak voltage applied to the transducer.     

Finite element modelling of ultrasound, with reference to transducers and AE waves

Finite element (FE) modelling has a role to play in simulating elastic wave propagation associated with structural vibrations, acoustic phenomena and ultrasound problems. In this work we have used the PAFEC software [PAFEC finite element software PACSYS, Strelley Hall, Nottingham, NG8 6PE, UK]. With the advent of increased computer power and greater availability of software these simulations have become more readily available and will provide improved insight into wave propagation problems. Simulations have been undertaken of transient wave propagation in steel plates with an attached simple resonant transducer. This simulates acoustic emission (AE) propagation in plate like structures relevant to many industrial applications. Simulations for short propagation distances suggest the resonant transducer voltage signal carries information on the plate-waves propagating in the structure, overlaid with the piezoelectric resonance and some information might be extracted from the transducer signal. Looking at the wave propagation information alone, a great deal of variability is seen in the displacement profile for different source types, orientations and locations. Although users have expressed a need for calibration of the AE detection process, this idea remains problematic since the complete generation and detection system has the features of a chaotic system. Using FE modelling a method of "point calibration" might be available, for some specific AE applications such as crack growth along known paths.     

Some basic relations for ultrasonic fields from circular transducers with a central hole

Ultrasonic transducers with a central hole are increasingly in use in high-intensity therapeutic ultrasound and similar medical applications. The hole is intended for the addition of a diagnostic device. Some fundamental properties of the fields produced by such transducers are investigated here theoretically, based on a Rayleigh integral algorithm. The approach is restricted to those cases where the Rayleigh integral can be fully solved to yield closed-formula results that can be easily used by the reader. This means a concentration on points on the field axis which, on the other hand, is most important under the aspect of the safety of the patient (maximum amplitudes). Closed-form expressions describing the influence of the central hole on the acoustic pressure, on the particle velocity and on the time-averaged intensity are presented. The relation between the true intensity and the intensity expression derived from the square of the acoustic pressure is discussed in some detail, an aspect which is important in ultrasonic measurement practice where the local intensity value is mostly assessed based on the square of a hydrophone signal.     

Nano-patterned visible wavelength filter integrated with an image sensor exploiting a 90-nm CMOS process

A highly efficient visible wavelength filter enabling a homogeneous integration with an image sensor was proposed and manufactured by employing a standard 90-nm CMOS process. A one dimensional subwavelength Al grating overlaid with an oxide film was built on top of an image sensor to serve as a low-pass wavelength filter; a microlens was then formed atop the filter to achieve beam focusing. The structural parameters for the filter were: a grating pitch of 300 nm, a grating height of 170 nm, and a 150-nm thick oxide overlay. The overall transmission was observed to reach up to 80% in the visible band with a decent roll-off near ～700 nm. Finally, the discrepancy between the observed and calculated result was accounted for by appropriately modeling the implemented metallic grating structure, accompanying an undercut sidewall.     

Improvement of leaching process of Geniposide with ultrasound

The effect of ultrasound on the leaching process, in which Geniposide is leached from the Gardenia fruit by deionized water at 20 degrees C, was investigated. The phase equilibrium and the dynamics were measured at static, stirring, and ultrasonically assisted conditions, respectively. The experimental results show that the extraction yield of Geniposide with ultrasound at 0.1533 W cm(-2), is increased by 16.5%, in comparison with that without ultrasound when the ratio of the solvent volume to the fruit weight is 40 ml/g. A model for mass transfer, based on the intraparticle diffusion and the external mass transfer, was developed. And the dynamic curves calculated by the model are in a good agreement with the experimental data. The external mass transfer coefficient k(f)/R and intraparticle diffusion coefficient D(e)/R2 were obtained by fitting of the experiment data. The external mass transfer coefficient with ultrasound at 0.1533 W cm(-2) is 1.63 times higher than that in static process, and the intraparticle diffusion coefficient with ultrasound at 0.1533 W cm(-2) is 3.25 times higher than that in static process.     

High efficiency grating couplers based on shared process with CMOS MOSFETs

Grating couplers are widely investigated as coupling interfaces between silicon-on-insulator waveguides and optical fibers.In this work,a high-efficiency and complementary metal-oxide-semiconductor(CMOS) process compatible grating coupler is proposed.The poly-Si layer used as a gate in the CMOS metal-oxide-semiconductor field effect transistor(MOSFET) is combined with a normal fully etched grating coupler,which greatly enhances its coupling efficiency.With optimal structure parameters,a coupling efficiency can reach as high as ～ 70% at a wavelength of 1550 nm as indicated by simulation.From the angle of fabrication,all masks and etching steps are shared between MOSFETs and grating couplers,thereby making the high performance grating couplers easily integrated with CMOS circuits.Fabrication errors such as alignment shift are also simulated,showing that the device is quite tolerant in fabrication.     

Is a cosmological substratum compatible with relativity?

A cosmological substratum for energy propagation is defined in terms of a hypothesis by McCrea. It has been shown that the assumption of such a substratum for a uniformly expanding universe provides a cosmological interpretation of Special Relativity, and leads further to a theory of gravitation in terms of a universal acceleration field. Following a critical discussion of the bases of General Relativity, it is suggested that the proposed substratum model and its consequences are also compatible with the General Relativistic approach, providing that this is applied in a manner which recognises the centrally directed character of gravitational fields, and hence employs harmonic coordinates as proposed by Fock. It is shown that Fock's procedure leads to results which are consistent with the assumption of a uniformly expanding cosmological substratum. Finally, it is suggested that the cosmological substratum concept is also implied by the formulation of the Robertson-Walker metric.     

Improving the air coupling of bulk piezoelectric transducers with wedges of power-law profiles: A numerical study

An air-coupled ultrasonic transducer is created by bonding a bulk piezoelectric element onto the surface of a thick plate with a wedge of power-law profile. The wedge is used to improve the ultrasonic radiation efficiency. The power-law profile provides a smooth, impedance-matching transition for the mechanical energy to be transferred from the thick plate to the air, through the large-amplitude flexural waves observed in the thinnest region of the wedge. The performance of the proposed transducer is examined numerically and compared to that of a design where the piezoelectric element is isolated and where it is affixed to a thin plate of uniform thickness. The numerical analysis is first focused on the free-field radiation of the transducers. Then, time-reversal experiments are simulated by placing the transducers inside a cavity of arbitrary shape with some perfectly reflecting boundaries. In addition to time-reversal mirrors, the proposed concept could be integrated in the design of phased arrays and parametric arrays.     

Novel post‐process for the passivation of a CMOS biosensor

Sensors, which are designed and fabricated in complementary metal oxide semiconductor (CMOS) technology, have become increasingly important in the field of bioelectronics. The standardized industry processes enable a fast, cheap, and reliable fabrication of biosensor devices with integrated addressing and processing units. However, the interfacing of such chips with a liquid environment has been a challenge in recent years. Especially for interfacing living cells with CMOS biosensors different elaborate post‐processes have been proposed. In this article we describe a novel and single step passivation of a CMOS biosensor using a bio‐compatible high‐permittivity thin film, which can be directly applied to the top aluminium layer of a CMOS process. The aluminium oxide and hafnium oxide multi‐layer thin films were prepared using atomic layer deposition at low process temperatures. Electrical I –V and capacitance measurements as well as electrochemical leakage current measurements were performed on films grown on aluminium bottom electrodes. The films showed a very low leakage current and were stable up to 6 V at a thickness of just 50 nm. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)