ZnO肖特基势垒紫外探测器

以p-Si(111)为衬底,用水热法首次制得六棱微管ZnO。并以此为有源区利用平面磁控溅射技术沉积得到Ag叉指状电报,从而制作了Ag／n-ZnO肖特基势垒结紫外探测器。对该紫外光探测器的暗电流和365nm波长光照下的光电流、光响应和量子效率进行了测试。测试结果表明：Ag和ZnO六棱管间已形成肖特基接触．其有效势垒高度为0．35eV。无光照时,暗电流很小,当用λ=365nm的光照射Ag/n-ZnO肖特基结时．在5．9V偏压时,光生电流分别为25．6,57．9μA。Ag／n-ZnO紫外探测器有明显的光响应特性和较高的量子效率,在366nm波长处,光响应度达到最大值0．161A／W,量子效率为54．7％。     

ZnO薄膜肖特基二极管的研制

采用直流反应磁控溅射的方法,在Al/Si(100)衬底上沉积了ZnO晶体薄膜.利用Al和Pt作为与ZnO接触的欧姆电极与肖特基电极,制作了ZnO薄膜肖特基二极管.X射线衍射测试结果表明ZnO薄膜具有高度的c轴择优取向.原子力显微分析表明:样品表面光洁平整,晶粒尺寸约100nm,扩展电阻分析表明ZnO薄膜的厚度为0.4μm,载流子浓度为1.8×1015 cm-3,此后的霍尔测试证实了这一结果并说明ZnO的导电类型为n型.室温下的I-V测试显示ZnO肖特基二极管具有明显的整流特性.Pt与n型ZnO接触的势垒高度为0.54eV.文中的ZnO肖特基二极管为首次研制的原型器件,其性能可以通过器件结构与制作工艺的进一步优化而得到改善.     

The interface structure of high performance ZnO Schottky diodes

Oxidized iridium (IrO_x) anodes fabricated on n-type ZnO single crystal wafers using reactive pulsed laser deposition are known to produce high quality Schottky barriers with ideality factors approaching the image-force-controlled limit for laterally homogeneous interfaces. These high performance IrO_x/ZnO Schottky contacts were cross-sectioned and analyzed using transmission electron microscopy, revealing an amorphous interfacial layer of 2–3 nm thickness. Electron energy loss spectroscopy, used to study the composition of the interface region, showed evidence of significant zinc diffusion across the interface into the IrO_x film, which leads to the creation of Zn vacancies (acceptors), in the ZnO sub-interface region. There is also evidence for oxygen passivation near the interface resulting from the use of an active oxygen ambient during the IrO_x deposition. Both these factors may explain the outstanding electrical performance of these Schottky devices.     

Magnetic field rectifiers using semicircular Josephson junctions

A novel method for rectifying alternating magnetic fields is demonstrated using fluxons in semicircular Josephson junctions. An external magnetic field applied parallel to the dielectric barrier of the semicircular junction has opposite polarities at the ends of the junction and supports penetration of opposite polarity fluxons into the junction in the presence of a constant dc bias. When the direction of the field is reversed, flux penetration is not possible and a flux-free state exists in the junction. Thus, effective rectification of an alternating magnetic field can be achieved in semicircular Josephson junctions. This unique phenomenon is specific to this geometry and can be employed in rf SQUID magnetometers.     

PEDOT:PSS Schottky contacts on annealed ZnO films

Polycrystalline ZnO and ITO films on SiO₂ substrates are prepared by radio frequency (RF) reactive magnetron sputtering. Schottky contacts are fabricated on ZnO films by spin coating with a high conducting polymer, poly(3, 4-ethylenedioxythiophene): poly(styrenesulfonate) (PEDOT:PSS) as the metal electrodes. The current-voltage measurements for samples on unannealed ZnO films exhibit rectifying behaviours with a barrier height of 0.72 eV (n=1.93). The current for the sample is improved by two orders of magnitude at 1 V after annealing ZnO film at 850 ℃, whose barrier height is 0.75 eV with an ideality factor of 1.12. X-ray diffraction, atomic force microscopy and scanning electron microscopy are used to study the properties of the PEDOT:PSS/ZnO/ITO/SiO₂. The results are useful for applications such as metal-semiconductor field-effect transistors and UV photodetectors.     

Influence of geometrical parameters on the behaviour of SiC merged PiN Schottky rectifiers with junction termination extension

This paper investigates the behaviours of 4H--SiC merged PiN Schottky (MPS) rectifiers with junction termination extension (JTE) by extensive numerical simulations. The simulated results show that the present model matches the experimental data very well. The influences of the JTE design parameters such as the doping concentration and length of the JTE on the breakdown characteristics are discussed in detail. Then the temperature sensitivity of the forward behaviour is studied in terms of the different designs of 4H--SiC MPS with JTE, which provides a particularly useful guideline for the optimal design of MPS rectifiers with JTE.     

Study of a double epi-layers SiC junction barrier Schottky rectifiers embedded P layer in the drift region

<正>This paper proposes a double epi-layers 4H—SiC junction barrier Schottky rectifier(JBSR) with embedded P layer (EPL) in the drift region.The structure is characterized by the P-type layer formed in the n-type drift layer by epitaxial overgrowth process.The electric field and potential distribution are changed due to the buried P-layer,resulting in a high breakdown voltage(BV) and low specific on-resistance(R_(on,sp)).The influences of device parameters,such as the depth of the embedded P+ regions,the space between them and the doping concentration of the drift region,etc.,on BV and R_(on,sp) are investigated by simulations,which provides a particularly useful guideline for the optimal design of the device.The results indicate that BV is increased by 48.5%and Baliga's figure of merit(BFOM) is increased by 67.9%compared to a conventional 4H-SiC JBSR.     

Stability of the bulk phase of layered ZnO

Recently a novel phase of ZnO has been synthesized which is analogous to α-boron nitride, although more three dimensional, and consists of planar hexagonal sheets of ZnO. Examining the dynamic stability of the structure, we find unstable phonon modes over a considerable part of the Brillouin zone. Local-density approximation (LDA) and generalized gradient approximation level calculations have usually been able to predict the structural stability of s-p bonded systems. The failure in the present case is a surprise and is traced to the self-interaction error which incorrectly locates the localized Zn d states in the valence band of ZnO. Correcting for this with a Hubbard-like U on the Zn d states, the optimized structure is predicted to be stable. This highlights the fact that the large bond length contraction that one finds in going from sp(3)- to sp(2)-type bonding results in an increased necessity to correct for self-interaction errors.     

Photoactive area modification in bulk heterojunction organic solar cells using optimization of electrochemically synthesized ZnO nanorods

In this work, Zn O nanorod arrays grown by an electrochemical deposition method are investigated. The crucial parameters of length, diameter, and density of the nanorods are optimized over the synthesize process and nanorods growth time. Crystalline structure, morphologies, and optical properties of Zn O nanorod arrays are studied by different techniques such as x-ray diffraction, scanning electron microscope, atomic force microscope, and UV–visible transmission spectra.The Zn O nanorod arrays are employed in an inverted bulk heterojunction organic solar cell of Poly(3-hexylthiophene):[6-6] Phenyl-(6) butyric acid methyl ester to introduce more surface contact between the electron transporter layer and the active layer. Our results show that the deposition time is a very important factor to achieve the aligned and uniform Zn O nanorods with suitable surface density which is required for effective infiltration of active area into the Zn O nanorod spacing and make a maximum interfacial surface contact for electron collection, as overgrowing causes nanorods to be too dense and thick and results in high resistance and lower visible light transmittance. By optimizing the thickness of the active layer on top of Zn O nanorods, an improved efficiency of 3.17% with a high FF beyond 60% was achieved.     

Experimental and numerical analyses of high voltage 4H-SiC junction barrier Schottky rectifiers with linearly graded field limiting ring

This paper describes the successful fabrication of 4H-SiC junction barrier Schottky(JBS) rectifiers with a linearly graded field limiting ring(LG-FLR). Linearly variable ring spacings for the FLR termination are applied to improve the blocking voltage by reducing the peak surface electric field at the edge termination region, which acts like a variable lateral doping profile resulting in a gradual field distribution. The experimental results demonstrate a breakdown voltage of 5 kV at the reverse leakage current density of 2 mA/cm2(about 80% of the theoretical value). Detailed numerical simulations show that the proposed termination structure provides a uniform electric field profile compared to the conventional FLR termination, which is responsible for 45% improvement in the reverse blocking voltage despite a 3.7% longer total termination length.     

Enhanced radiation hardness of ZnO nanorods versus bulk layers

It is shown that ZnO nanorods grown by MOCVD exhibit enhanced radiation hardness against high energy heavy ion irradiation as compared to bulk layers. The decrease of the luminescence intensity induced by 130 MeV Xe⁺²³ irradiation at a dose of 1.5 × 10¹⁴ cm^–2 in ZnO nanorods is nearly identical to that induced by a dose of 6 × 10¹² cm^–2 in bulk layers. The change in the nature of electronic transitions responsible for luminescence occurs at an irradiation dose around 1 × 10¹⁴ cm^–2 and 5 × 10¹² cm^–2 in nanorods and bulk layers, respectively. High energy heavy ion irradiation followed by thermal annealing is also effective on the quality of ZnO nanorods grown by electrodeposition. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Surface phonon polariton characteristics of bulk wurtzite ZnO crystal

The surface phonon polariton (SPP) mode of bulk wurtzite (α-) zinc oxide (ZnO) crystal is investigated by means of p-polarized infrared attenuated total reflection (ATR) spectroscopy. From the ATR spectrum, a strong absorption dip corresponds to the SPP mode of bulk α-ZnO is clearly observed at 529 cm⁻¹. The experimental SPP mode showed good agreement with the theoretical SPP mode deduced from the surface polariton dispersion curve generated by the semi-infinite anisotropic crystal model.     

Detection of ozone by differential absorption using CO2 laser

The differential absorption method with the conventional CO₂ laser is discussed for the detection and monitoring of ozone in ambient atmosphere. By using the P(14) line in the (00°1 to 02°0) and the R(16) line in the (00°1 to 10°0) band, the measurement of ozone was made in a field. As an experimental result, the minimum detectable concentration of 0.15 ppm was obtained with the system, and the concentration of 0.2 ppm was measured in a photo-chemical smog.     

Transparent p‐NiO/n‐ZnO diodes used in circuit rectifiers

We report on the fabrication of a transparent photostable cell circuit composed of drive and resistor diodes which are face‐to‐face connected to each other with different device area. The diodes consisted of e‐beam evaporated p‐NiO on sputter‐deposited n‐ZnO for p/n diode formation on indium‐tin‐oxide glass. Our transparent diodes show photostable rectifying behavior, about 10³ on/off current ratio and even dynamic rectification at a maximum frequency of 100 Hz AC input signal in ambient light. The noticeable photo‐responsivity of the circuit was obtained only under ultraviolet (UV) light. We conclude that our transparent diode circuit is promising in enriching the field of transparent device electronics. (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Effect of CO on Characteristics of AlGaN/GaN Schottky Diode

Pt Schottky diode gas sensors for CO are fabricated using A1GaN/GaN high electron mobility transistor（HEMTs）structure. The diodes show a remarkable sensor signal （3 mA, in N2, 2mA in air ambient） biased 2 V after 1% CO is introduced at 50℃. The Schottky barrier heights decrease for 36meV and 27meV in the two cases respectively. The devices exhibit a slow recovery characteristic in air ambient but almost none in the background of pure N2, which reveals that oxygen molecules could accelerate the desorption of CO and offer restrictions to CO detection.     

Surface and bulk thermal annealing effects on ZnO crystals

Annealing at temperatures up to 1000 °C is shown to decrease band edge photoluminescence in bulk ZnO crystals and increase deep level-related emission. The surface roughens for anneals in the range of 600-800 °C as O is lost preferentially from the surface, but at 900 °C the morphology improves as excess Zn is also lost from the surface. Splitting of the peak in the rocking curve of the ZnO (0 0 2) plane after annealing at 900-1000 °C indicates that the substrate is a mosaic of two or more crystals oriented slightly differently from one another and we are detecting differences in orientation of some of the grains in different areas or small changes due to annealing. There was no significant change in bulk conductivity of the ZnO for anneals up to 1000 °C, suggesting that ion implantation followed by annealing may be an effective approach for doping in this.     

基于ZnO薄膜的高次谐波体声波谐振器的研究

基于ZnO作压电层和蓝宝石作基底的高次谐波体声波谐振器(HBAR),采用不同电极材料和溅射方法进行优化。优化选定镀铬-金/氧化锌/铬-金/蓝宝石结构。对制备的器件进行了测试分析,结果显示,具有多模谐振特性的HBAR器件在2.87GHz Q值达到43000。根据一维Mason等效电路模型,HBAR器件还进行了理论仿真,结果表明理论结果与实测值基本一致。     

Fabrication and analysis of ZnO thin film bulk acoustic resonators

This study employs RF magnetron sputter technique to deposit high C-axis preferred orientation ZnO thin film on silicon substrate, which is then used as the piezoelectric thin film for a thin film bulk acoustic resonator (FBAR). Electrical properties of the FBAR component were investigated by sputtering a ZnO thin film on various bottom electrode materials, as well as varying sputter power, sputter pressure, substrate temperature, argon and oxygen flow rate ratio, so that structural parameters of each layer were changed. The experimental results show that when sputter power is 200 W, sputter pressure is 10 mTorr, substrate temperature is 300 °C, and argon to oxygen ratio is 4:6, the ZnO thin film has high C-axis preferred orientation. The FBAR component made in this experiment show that different bottom electrode materials have great impact on components. In the experiment, the Pt bottom electrode resonant frequency was clearly lower than the Mo bottom electrode resonant frequency, because Pt has higher mass density and lower acoustic wave rate. The component resonant frequency will decrease as ZnO thin film thickness increases; when top electrode thickness is higher, its resonant frequency also drops, due to top electrode mass loading effect and increased acoustic wave path. Therefore, ZnO thin film and top/bottom electrode thickness can be fine-tuned according to the required resonant frequency.