大气压直流氩等离子体射流工作特性研究

介绍了一种新型大气压直流双阳极等离子喷枪,并对其电特性参数和发射光谱进行了测量.通过对氩等离子体射流的电信号进行时域和频域分析,研究了载气流量和弧电流的变化对射流脉动的影响,结果表明氩等离子体电弧的伏安特性呈上升趋势,射流脉动属于接管模式,电源特性中的交流分量引起的电压波动是影响氩等离子体射流脉动的主要因素. 通过光谱法测量了氩等离子体射流在弧室内和弧室出口的发射光谱,利用玻尔兹曼曲线斜率法计算了射流的激发温度,根据Ar I谱线的斯塔克展宽得到了射流的电子密度,并对等离子体射流满足局域热力学平衡(LTE) 关键词： 等离子喷枪 射流脉动 激发温度 局域热力学平衡     

A stationary filamentary microwave discharge at a high pressure of argon

A stationary discharge in the form of a filament about 1 mm in diameter is produced in a quartz tube 16 mm in diameter passed through the wider wall of a standard waveguide and field with argon at a pressure of 300 mm Hg at a microwave power of 50 W on a frequency of 7 GHz. The number of filaments increases gradually from one to seven as the power and pressure are increased. The filaments are parallel and oriented along the electric field of the wave. They are arranged symmetrically relative to the equatorial plane of the tube. The distance between the filaments decreases as their number increases. The stationary filaments arising due to ionization-overheating instability may be explained qualitatively using the interference-equilibrium model and assuming that a discharge is organized such as to provide for the maximal power absorption.     

Effects of gas pressure on plasma characteristics in dual frequency argon capacitive glow discharges at low pressure by a self-consistent fluid model

A self-consistent fluid model for dual radio frequency argon capacitive glow discharges at low pressure is established.Numerical results are obtained by using a finite difference method to solve the model numerically, and the results are analyzed to study the effect of gas pressure on the plasma characteristics. It shows that when the gas pressure increases from 0.3 Torr(1 Torr = 1.33322×10~2 Pa) to 1.5 Torr, the cycle-averaged plasma density and the ionization rate increase;the cycle-averaged ion current densities and ion energy densities on the electrodes electrode increase; the cycle-averaged electron temperature decreases. Also, the instantaneous electron density in the powered sheath region is presented and discussed. The cycle-averaged electric field has a complex behavior with the increasing of gas pressure, and its changes take place mainly in the two sheath regions. The cycle-averaged electron pressure heating, electron ohmic heating, electron heating, and electron energy loss are all influenced by the gas pressure. Two peaks of the electron heating appear in the sheath regions and the two peaks become larger and move to electrodes as the gas pressure increases.     

发射光谱法测量常压介质阻挡放电氩等离子体的放电参数

介绍发射光谱法测量常压介质阻挡氩等离子体的放电参数的方法,通过常压介质阻挡放电氩等离子体的光谱图,测量和计算了等离子体的电子温度和电子浓度.     

Diagnosis of a low pressure capacitively coupled argon plasma by using a simple collisional-radiative model

This paper proposes a simple collisional-radiative model to characterise capacitively coupled argon plasmas driven by conventional radio frequency in combination with optical emission spectroscopy and Langmuir probe measurements. Two major processes are considered in this model, electron-impact excitation and the spontaneous radiative decay. The diffusion loss term, which is found to be important for the two metastable states (4s[3/2]₂, 4s'[1/2]₀), is also taken into account. Behaviours of representative metastable and radiative states are discussed. Two emission lines (located at 696.5 nm and 750.4 nm) are selected and intensities are measured to obtain populated densities of the corresponding radiative states in the argon plasma. The calculated results agree well with that measured by Langmuir probe, indicating that the current model combined with optical emission spectroscopy is a candidate tool for electron density and temperature measurement in radio frequency capacitively coupled discharges.     

Transmission properties of microwave in rectangular waveguide through argon plasma

To study the impact of plasma generated by microwave breakdown on the propagation properties of microwave in high power microwave(HPM) devices, a three-dimensional(3-D) fluid model of argon plasma slab in rectangular waveguide is established and calculated by the finite-difference-time-domain(FDTD) method. A rectangular waveguide with a breakdown chamber filled with argon is set as the physics model, and HPM with frequency of 3–50 GHz propagates through this physics model. The time evolutions of the breakdown process are investigated, the reflection, transmission, and absorption coefficients of HPM are calculated, and the influences of some important parameters, including the thickness of the plasma slab and the microwave frequency on the propagation properties of the microwave are shown. Results of this work can offer theoretical instructions for suppressing the influence of breakdown to the performance of HPM devices, and for the use of microwave breakdown, such as the design of plasma limiter or absorber in HPM devices.     

Conversion of an atomic to a molecular argon ion and low pressure argon relaxation

The dominant process in relaxation of DC glow discharge between two plane parallel electrodes in argon at pressure200 Pa is analyzed by measuring the breakdown time delay and by analytical and numerical models. By using the approximate analytical model it is found that the relaxation in a range from 20 to 60 ms in afterglow is dominated by Ar+2ions,produced by atomic-to-molecular conversion of Ar+ions in the first several milliseconds after the cessation of the discharge.This conversion is confirmed by the presence of double-Gaussian distribution for the formative time delay, as well as conversion maxima in a set of memory curves measured in different conditions. Finally, the numerical one-dimensional(1D)model for determining the number densities of dominant particles in stationary DC glow discharge and two-dimensional(2D) model for the relaxation are used to confirm the previous assumptions and to determine the corresponding collision and transport coefficients of dominant species and processes.     

Effect of microwave frequency on plasma formation in air breakdown at atmospheric pressure

Microwave breakdown at atmospheric pressure causes the formation of a discrete plasma structure. The onedimensional fluid model coupling Maxwell equations with plasma fluid equations is used to study the effect of the microwave frequency on the formation of air plasma. Simulation results show that, the filamentary plasma array propagating toward the microwave source is formed at different microwave frequencies. As the microwave frequency decreases, the ratio of the distance between two adjacent plasma filaments to the corresponding wavelength remains almost unchanged(on the order of 1/4), while the plasma front propagates more slowly due to the increase in the formation time of the new plasma filament.     

High-mobility SiC MOSFET with low density of interface traps using high pressure microwave plasma oxidation

The microwave plasma oxidation under the relatively high pressure(6 kPa)region is introduced into the fabrication process of SiO2/4 H-SiC stack.By controlling the oxidation pressure,species,and temperature,the record low density of interface traps(~4×10¹⁰cm^-2·eV^-1@Ec-0.2 eV)is demonstrated on SiO2/SiC stack formed by microwave plasma oxidation.And high quality SiO2 with very flat interface(0.27-nm root-mean-square roughness)is obtained.High performance Si C metal–oxide–semiconductor field-effect transistors(MOSFETs)with peak field effect mobility of 44 cm^-2·eV^-1is realized without additional treatment.These results show the potential of a high-pressure plasma oxidation step for improving the channel mobility in SiC MOSFETs.     

Dynamics of ZnO laser produced plasma in high pressure argon

Pulsed laser deposition of ZnO in high pressure gas offers a route for the catalyst-free preparation of ZnO nanorods less than 10 nm in diameter. This paper describes the results of some experiments to investigate the laser plume dynamics in the high gas pressure (5 × 10³-10⁴ Pa) regime used for PLD of ZnO nanorods. In this regime the ablation plume is strongly coupled to the gas and the plume expansion is brought to a halt within about 1 cm from the target. A 248 nm excimer laser was used to ablate a ceramic ZnO target in various pressures of argon. Time- and space-resolved UV/vis emission spectroscopy and Langmuir probe measurements were used to diagnose the plasma and follow the plume dynamics. By measuring the spatial profiles of Zn I and Zn II spectral lines it was possible to follow the propagation of the external and internal shock waves associated with the interaction of the ablation plume with the gas. The Langmuir probe measurements showed that the electron density was 10⁹-10¹⁰ cm⁻³ and the electron temperature was several eV. At these conditions the ionization equilibrium is described by the collisional-radiative model. The plume dynamics was also studied for ZnO targets doped with elements which are lighter (Mg), comparable to (Ga), and heavier (Er) than Zn, to see if there is any elemental segregation in the plume.     

Influence of oxygen addition on the discharge characteristics of an argon plasma jet at atmospheric pressure

Plasma jet is an important low-temperature plasma source in extensive application fields. To promote the production of active oxygen species, oxygen is often introduced into the inert working gas. However, the influence of oxygen content on the discharge characteristics of an argon plasma jet is not clear. Aim to this status, an argon plasma jet in a single-electrode geometry is employed to investigate the influence of oxygen concentration (C_O) on discharge aspects. Results indicate that with increasing C_O (≤ 0.6%), the plume transits from a diffuse morphology to a hollow structure. Electrical and optical measurements reveal that both discharge number per voltage cycle and pulse intensity alter with varying C_O. Moreover, discharge morphologies of negative and positive discharges obtained by fast photograph also shift with varying C_O. Besides, optical emission spectra are collected to investigate atomic C_O, electron density, and electron temperature. The results mentioned above are explained qualitatively, which are believed to be of great significance for the applications of atmospheric pressure plasma jet.     

Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure

A one-dimensional(1D) fluid model on capacitively coupled radio frequency(RF) argon glow discharge between parallel-plates electrodes at low pressure is established to test the effect of the driving frequency on electron heating. The model is solved numerically by a finite difference method. The numerical results show that the discharge process may be divided into three stages: the growing rapidly stage, the growing slowly stage, and the steady stage. In the steady stage,the maximal electron density increases as the driving frequency increases. The results show that the discharge region has three parts: the powered electrode sheath region, the bulk plasma region and the grounded electrode sheath region. In the growing rapidly stage(at 18 μs), the results of the cycle-averaged electric field, electron temperature, electron density, and electric potentials for the driving frequencies of 3.39, 6.78, 13.56, and 27.12 MHz are compared, respectively. Furthermore,the results of cycle-averaged electron pressure cooling, electron ohmic heating, electron heating, and electron energy loss for the driving frequencies of 3.39, 6.78, 13.56, and 27.12 MHz are discussed, respectively. It is also found that the effect of the cycle-averaged electron pressure cooling on the electrons is to "cool" the electrons; the effect of the electron ohmic heating on the electrons is always to "heat" the electrons; the effect of the cycle-averaged electron ohmic heating on the electrons is stronger than the effect of the cycle-averaged electron pressure cooling on the electrons in the discharge region except in the regions near the electrodes. Therefore, the effect of the cycle-averaged electron heating on the electrons is to "heat" the electrons in the discharge region except in the regions near the electrodes. However, in the regions near the electrodes, the effect of the cycle-averaged electron heating on the electron is to "cool" the electrons. Finally, the space distributions of the electron pressure cooling the electron ohmic heating and the electron heating at 1/4 T, 2/4 T, 3/4 T, and 4/4 T in one RF-cycle are presented and compared.     

Comparison of two cold atmospheric pressure plasma jet configurations in argon

The present study compares the operation of two cold atmospheric plasma jet (CAPJ) configurations: needle-to-cylinder electrode configuration (CAPJ I) and single high-voltage cylinder electrode around the quartz tube (CAPJ II). The CAPJs were operated in argon flowing through a quartz capillary with 0.5-mm inner diameter into the ambient air, and the plasma was generated by sinusoidal kHz frequency AC power supplies. The main emphasis of the study was on the mechanism of the initiation of ionization waves for these two configurations. For both CAPJs, there appeared several ionization waves during one half-period of the applied voltage waveform, and the number of ionization waves increased at higher voltage amplitudes. However, we discovered marked differences in the initiation of the ionization waves for two different CAPJ configuration. The applied voltage controlled the initiation of consecutive ionization waves, which propagated from the grounded electrode towards the tube orifice in CAPJ I. In the case of CAPJ II, certain time had to pass for the initiation of a new ionization wave, and subsequent ionization waves within the same half-period started at the tube orifice. In addition to the differences in the initiation of the ionization waves, we observed that the CAPJ I was ignited and sustained at lower voltages, while CAPJ II produced a longer plasma jet. The observed advantages and deficiencies of investigated CAPJ configurations point out their potential in different applications.     

一种大气微波环形波导等离子体设备

微波等离子体相对其它等离子体而言有很多的优点,具有极高的工业应用价值。但在大气条件下,大体积的微波等离子体较难获得。为达到产生该种微波等离子体并将之应用的目的,特设计了一台环形波导反应腔设备并从事了等离子体激发的相关研究。介绍了该设备的设计思路,给出了常用的非磁化微波等离子体工作气体的击穿曲线,通过软件仿真得到了反应腔内的电场分布,并陈述了微波等离子体反应的基本现象。结合试验的结果,证明了软件仿真的正确性和装置的有效性。目前,该装置可在大气压下顺利激发一定体积的氦、氩等离子体。     

新型大气压微波等离子体炬的仿真研究

设计了一种新型的大气压微波等离子体炬结构。入射主频为2 450 MHz,基于HFSS软件对其进行了仿真研究。在仿真过程中,对该结构的各个参数进行了优化,并得出对场强分布的影响规律。结果表明,探针的使用对腔内场分布有很大影响。根据优化参数对微波等离子体炬进行了仿真模拟,在等离子体发生腔产生了高幅值的电场强度,品质因数达到2×104,可以在大气压下激发等离子体。     

一种大气微波环形波导等离子体设备

 微波等离子体相对其它等离子体而言有很多的优点,具有极高的工业应用价值。但在大气条件下,大体积的微波等离子体较难获得。为达到产生该种微波等离子体并将之应用的目的,特设计了一台环形波导反应腔设备并从事了等离子体激发的相关研究。介绍了该设备的设计思路,给出了常用的非磁化微波等离子体工作气体的击穿曲线,通过软件仿真得到了反应腔内的电场分布,并陈述了微波等离子体反应的基本现象。结合试验的结果,证明了软件仿真的正确性和装置的有效性。目前,该装置可在大气压下顺利激发一定体积的氦、氩等离子体。     

垂直入射电磁波在大气压非平衡等离子体层中的传播特性

用数值模拟的方法对大气压非平衡等离子体薄层中，不同的电子密度分布对微波反射、吸收和透射的影响进行了研究。所采用的理论分析方法是分层模型和镶嵌不变原理。计算中考虑了微波在子层间的多次反射和吸收。数值结果表明，对于电磁波的吸收来说，等离子体中具有二次分布的电子密度，其效果要高于线性分布10%左右；而对于反射来说，线性分布效率更高。功率反射系数随波长的增大而增大，功率吸收系数A也不是单调的，当电子密度不变时，A存在一个峰值，随着电磁波波长的增加而增加，达到最大值后，缓慢降低。     

垂直入射电磁波在大气压非平衡等离子体层中的传播特性

用数值模拟的方法对大气压非平衡等离子体薄层中,不同的电子密度分布对微波反射、吸收和透射的影响进行了研究。所采用的理论分析方法是分层模型和镶嵌不变原理。计算中考虑了微波在子层间的多次反射和吸收。数值结果表明,对于电磁波的吸收来说,等离子体中具有二次分布的电子密度,其效果要高于线性分布10%左右;而对于反射来说,线性分布效率更高。功率反射系数随波长的增大而增大,功率吸收系数A也不是单调的,当电子密度不变时,A存在一个峰值,随着电磁波波长的增加而增加,达到最大值后,缓慢降低。     

大气压微波等离子体射流装置放电特性研究

基于同轴传输线结构设计了两种不同喷嘴结构的大气压微波等离子体射流(MW-APPJ)装置,其工作频率2.45 GHz,工作气体为氩气,分别研究了两种不同喷嘴结构对等离子体放电特性产生的影响。仿真结果表明,MW-APPJ在气体喷嘴处会产生高强度的电场,经过优化结构,实现在频率2.45 GHz下,喷嘴处的场强满足氩气电离的击穿场强阈值要求。同时,利用多物理场耦合仿真软件对装置的气流分布进行了稳态模拟,并通过实验对比分析了两种喷嘴结构下大气压氩等离子体射流的基本特性。实验结果表明,不同的喷嘴结构会影响等离子体装置的反射系数随输入功率的变化规律,但并不影响等离子体射流长度随输入功率的变化规律和反射功率随进气流量的变化规律;同时,在大气压下,稳态微波等离子体射流呈现出类金属性,等离子体中的电子只能在很薄的区域中吸收微波能量,因而造成微波的反射功率较大。     

The Lindemann melting parameter for argon at high pressure

Elastic constant measurements in solidified argon near the melting temperature have been made for reduced volumes corresponding to melting temperatures from 123 to 206 K. Derived values of the Debye temperature in the limit T → T_m, allowed the Lindemann parameter to be determined, showing that within experimental error, the parameter is constant along that portion of the melting line.