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纳米级光学超精密加工是软X射线光学和光电子学元件制备的重要基础技术之一。本文概述这一技术研究的主要内容并介绍近10年来特别是80年代后期在这一研究领域的最新进展,例如单点金刚石车削、可延展磨削、浮法抛光以及离子束抛光等。超精密加工的最终目标是直接操纵原则,本文还介绍了用扫描隧道显微镜(STM)实现亚纳米级超精密加工的可能性。亚纳米级超精密加工技术将成为下个世纪重要的高技术。 相似文献
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何建国 《工程物理研究院科技年报》2009,(1):69-70
磁流变抛光技术利用磁流变抛光液的可控流变特性进行加工,被誉为光学制造界的革命性技术。重大光学工程、光刻机系统以及强激光武器等,对光学平面、球面及非球面元件的超精密加工提出了较强的需求,传统抛光技术已经难以满足这些元件的加工质量要求。 相似文献
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超精密单点金刚石车削加工是高精度衍射光学元件制造的重要方法,但是以往的加工方法是直接一次车削加工成型,无法实现具有加工-检测-补偿加工-检测的闭环控制特点的超精密加工,从而导致零件精度较低。针对这种加工技术的缺陷,通过研究衍射光学元件金刚石车削过程和面形状误差补偿,对表面轮廓仪实际测量的轮廓数据进行处理,计算出实际车削曲线与理想曲线之间的法向残余误差,以此获得新的金刚石车削加工轨迹,实现衍射光学元件的超精密闭环控制加工。利用单点金刚石车床对口径78的衍射光学元件进行补偿加工试验,最终使其PV值由10.4 m经过一次补偿加工后降为4.3 m。 相似文献
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在大口径超精密平面光学元件加工中,环抛是一种重要的抛光技术,作为古典抛光的一种改进工艺,它在光学加工中得到了广泛的应用。但是它目前还存在着一些问题:对操作者的经验依赖太强,加工效率不高,加工质量也不稳定。根本原因是人们对抛光磨削的规律还认识不够,尤其是—些工艺参数的影响。 相似文献
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塑料透镜的开发与生产 总被引:2,自引:1,他引:1
本文综述了塑料光学元件的开发和生产。首先介绍了光学塑料材料,塑料透镜的设计,模具的材料和加工技术,然后介绍了精密塑料透镜的注射成型工艺和光学塑料非球面的测量。 相似文献
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衍射光学元件较球面、非球面光学元件在校正色差方面具备较大优势,尤其是在红外光学领域,应用衍射光学元件可进一步增加光学系统的设计自由度。随着红外光学市场的进一步增大,常规的衍射光学金刚石车削技术难以满足大规模需求,精密模压技术成为解决上述问题的关键技术。模具设计是实现精密模压的重点,为了缩减模具设计周期,该文采用有限元仿真方法对模具进行预先设计及补偿,并试加工。采用单站式精密模压机对设计的模具进行了精密模压试验。模压试验结果表明:采用合理的工艺参数,能够实现衍射光学元件面形精度PV达到0.56μm,位置误差<0.011 mm,环带高度误差<0.12μm,验证了仿真预先补偿在衍射光学模具设计中的有效性。 相似文献
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通过对Φ42 mm和Φ82 mm口径非球面光学零件精密铣磨成型过程的加工特点和加工误差因素的分析,在工艺中引入刀具与工件变形、刀具半径误差等因素,结合经典Hertz接触理论建立了刀具与工件变形量及刀具半径误差和补偿理论模型,并且应用在精密铣磨成型过程中,通过实验,Φ42 mm口径非球面光学零件经一次精密铣磨成型后元件面形精度PV值为1.91μm,RMS值达到0.288μm;Φ82 mm口径非球面光学零件经一次精密铣磨成型后元件面形精度PV值为1.60μm,RMS值达到0.385μm,完全满足加工精度要求,加工时间节省了50%以上。实验验证了理论分析及误差补偿方法的正确性,实现了精密光学非球面元件的快速精密铣磨成型加工。 相似文献
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单点金刚石精密数控车削加工技术及发展前景分析 总被引:2,自引:0,他引:2
针对我国红外热像仪、探测仪及惯性约束核聚变工程对红外晶体类光学元件的需求,开展了单点金刚石精密数控车削加工技术的研究,分析了单点金刚石精密数控车削加工技术的特点及应用范围、机床整体布局及主体结构型式。介绍了该项技术在国内外的发展现状和趋势,对该项技术的应用发展前景进行了分析和预测。在消化和引进国外先进制造技术和最新研究成果的基础上,突破单点金刚石精密数控车削加工的关键制造技术,解决了我国光学非球面精密数控车削加工技术和设备依赖引进的问题,实现了单点金刚石精密数控车削加工技术及设备的国产化,提高了我国红外光学元件的精密加工技术水平和设备制造能力。 相似文献
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单点金刚石车削加工切削距离的计算 总被引:1,自引:0,他引:1
讨论了大型金属反射镜在金刚石车削中,金刚石刀具的磨损对加工精度的影响;详细介绍了超精密加工中几种典型零件形状单点金刚石车削加工的切削距离计算方法,经计算在加工直径为1000mm的圆盘工件时,当刀具的进给量为2μm/r,切削距离达到近400km。通过计算为加工大型光学元件刀具磨损规律的研究提供分析基础。 相似文献
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Atmospheric Plasma Jet Machining (PJM) is a technology for non‐mechanical ultra‐precision surface shape generation, shape error correction and smoothing based on atmospheric plasma jets. PJM is favorably applied to generate optical surfaces like aspheres, acylinders, or free‐forms but also to improve the surface shape accuracy in a very fast and cost‐efficient way. For that purpose a mainly fluorine containing plasma jet is brought into contact with a surface to locally remove material by a chemical reaction forming volatile products. Hence, the technology is limited to materials like silicon, fused silica and similar, or silicon carbide. Furthermore, the etch profile results from a convolution of the radical and the temperature distribution at the surface. Since the temperature distribution is also influenced by the plasma jet this leads to a non‐linear dependence of the removal function of the plasma tool on its velocity. Using the dwell‐time algorithm for deterministic surface machining by superposition of the local removal function of the plasma tool an advanced process simulation is necessary. In a first local approximation the velocity dependence of the removal function, which has to be determined previously, must be incorporated. Second order thermal effects due to inhomogeneous heating caused by the part geometry and the tool path can be managed by a sophisticated calculation of the surface temperature evolution during machining based on the Finite Element Method (FEM). With the help of this procedure the accuracy and convergence of the machining process can be significantly improved. In the article several examples of surface processing using plasma jet machining are presented. (© 2014 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim) 相似文献
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New development of atmospheric pressure plasma polishing 总被引:1,自引:0,他引:1
Atmospheric pressure plasma polishing (APPP) high quMity optical surfaces. The changes of is a precision machining technology used for manufacturing surface modulus and hardness after machining prove the distinct improvement of surface mechanical properties. The demonstrated decrease of surface residual stresses testifies the removal of the former deformation layer. And the surface topographies under atomic force microscope (AFM) and scanning electron microscope (SEM) indicate obvious amelioration of the surface status, showing that the 0.926-nm average surface roughness has been achieved. 相似文献
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We review our recent progress toward attosecond‐precision ultrafast photonics based on ultra‐low timing jitter optical pulse trains from mode‐locked lasers. In femtosecond mode‐locked lasers, the concentration of a large number of photons in an extremely short pulse duration enables the scaling of timing jitter into the attosecond regime. To characterize such jitter levels, we developed new attosecond‐resolution measurement techniques and show that standard fiber lasers can achieve sub‐fs high‐frequency jitter. By leveraging the ultra‐low jitter of free‐running mode‐locked lasers, we pursued high‐precision optical‐optical and optical‐microwave synchronization techniques. Optical signals spanning 1.5 octaves were synthesized by attosecond‐precision timing and phase synchronization of two independent mode‐locked lasers. High‐stability microwave signals were also synthesized from mode‐locked lasers with drift‐free sub‐10‐fs precision. We further demonstrated the attosecond‐precision distribution of optical pulse trains to remote locations via timing‐stabilized fiber links. Finally, the application of optical pulse trains for high‐resolution sampling and analog‐to‐digital conversion is discussed. 相似文献