基于全场干涉测量方法的透镜三维轮廓测量

为了满足高精度透镜加工工艺的要求,设计了一套基于全场干涉测量方法的透镜三维轮廓测量系统。已标定的透镜三维轮廓测量系统利用分布式反馈激光二极管对透镜进行波数扫描,对CCD相机采集到的干涉图像依次进行随机采样傅里叶变换和解卷绕算法,最终通过计算得出透镜的三维轮廓数据。实验结果表明:该系统横向和纵向的分辨率均为0.011 3 mm/pixels,深度方向的测量均方根误差为±19.8 nm。系统结构简单、稳定性高,对透镜没有任何接触,不会对透镜表面造成损伤,适用于透镜的高精度轮廓测量。     

光切法三维轮廓测量的原理及其应用

本文阐明了光切法三维轮廓测量的原理，分析了光切法在实际测量系统中的应用——双光源光切法，提出了与之相适应的空间及图像匹配方法，并用实验证明了此方法的正确性     

用投影光栅法测量三维物体表面轮廓形状的评述

从相位的调制与解调角度出发，综述用投影光栅法测量三维物体表面轮廓形状的几种方法：莫尔拓扑法、傅里叶交换轮廓法和相位步进解调法，同时讨论各种方法的优点和不足。     

测量薄透镜折射率及曲率半径的一种方法

一、引言透镜的参数主要包括折射率n及曲率半径R等。若想得到n、R就必须用不同的实验方法分别测量。通常我们在实验中测定固体折射率所采用的方法对被测光学样品的形状都有特殊要求。浸液法虽然可测任意形体的样品,但实际操     

用线阵CCD实现透镜曲率半径自动测量的研究

介绍一种自测量和显示透镜曲率半径的系统。叙述该系统的工作原理,分析系统软、硬件设计及测量产生的误差。     

一种新的相位测量轮廓术

首次提出了变精度二次测量轮廓术，利用这一技术，在相位过程中，对有断点及边介区域也能得到正确的去包裹相位值。文中讨论了相位恢复的误差容限。最后，把这一技术用于三维面形测量中，并得到了较好的实验结果。     

三维形貌测量的扫描相移法研究

物体三维形貌测量中常用的光切法的主要优点是易于实现扫描测量大型物体表面,缺点是光刀中心位置难以精确确定;相移法的主要优点是可以用较宽的光栅提高测量的灵敏度与准确度,具有测量速度快和较好的抗静态噪声的能力,缺点是当待测范围较大时,采集图像的像差较大,不利于大型物面的测量.将这两种方法有机地结合起来,取长补短,提出了一种扫描相移法.实验结果表明,这个方法不但适用于长形大物面的形貌检测,而且又大大地减少了图像采集系统畸变误差的影响,从而提高了检测准确度.     

双探头三维表面轮廓测量系统

提出了一种将原子力显微(AFM)探头与位置敏感探测器测距探头相结合的双探头三维表面轮廓测量新方法, 可在获取样品表面轮廓的同时, 测定样品局部形貌。搭建了双探头三维表面轮廓测量系统, 阐述了系统的工作原理, 并对其结构组成包括双探头、步进扫描台和计算机控制平台进行了说明。用2000 line/mm的光栅进行了扫描实验, 对系统的测量范围进行了标定。以外径8 mm、内径4 mm的金属垫圈为样品, 进行了整体三维表面轮廓与局部表面形貌测量实验, 给出了垫圈表面图和局部三维形貌图。结果表明, 该系统能满足不同尺寸和材质的样品的测量要求, 即可实现对样品轮廓的大范围扫描测量, 又可对样品局部进行高精度形貌测量。     

基于位相测量轮廓术的三维数字化仪的实验研究

介绍了基于位相测量轮廓术的三维数字化仪的原理和系统结构 ,阐述了一种有效的三维数字化方法。该方法具有精度高、速度快、可实现自动测量等特点。     

台阶状面形的投影栅线法测量技术

采用光栅投影式三维轮廓术测量物体三维形貌时，当物体是台阶状物体时，物体表面的光栅条纹有阴影，导致后面的叠相还原过程无法进行。为了解决这一问题，将被测物体放在精密的旋转平台上。通过2次成像后，对2幅图像进行图像拼接，得到清晰的被光栅调制的物体图像。在图像拼接时，引入区域黑白对比度概念，区域的黑白对比度最大位置就是黑白区域的分界线。从而精确确定中间块2个边界的位置,然后进行图像拼接。最后采用双频光栅的傅里叶变换轮廓术来实现物体的三维形貌重建。结果表明：本方法简单、精度高，可以成功解决投影时具有阴影物体的三维形貌重建问题。     

基于自动对焦技术的透镜曲率半径检测

为实现光学透镜曲率半径的快速准确测量,设计了一种基于自动对焦技术的非接触式透镜曲率半径测量方案。测量系统分别在被测透镜表面的顶点位置和曲率中心位置自动对焦,系统所记录的两个位置之间的距离即为曲率半径。针对透镜曲率半径检测应用,对自动对焦技术进行了改进:将连通区域提取技术应用于定位目标图像,提高了清晰度评价函数的灵敏度;利用均值比较法和三点法改进了传统爬山搜索策略。实验结果表明:基于自动对焦技术的透镜曲率半径检测是有效的,测量误差低于0.196%,测量重复性好于0.109%。该方法已经成功应用于透镜曲率半径测量仪。     

A flexible fast 3D profilometry based on modulation measurement

This paper proposes a flexible fast profilometry based on modulation measurement. Two orthogonal gratings through a beam splitter are vertically projected on an object surface, and the measured object is placed between the imaging planes of the two gratings. Then the image of the object surface modulated by the orthogonal gratings can be obtained by a CCD camera in the same direction as the grating projection. This image is processed by the operations consisting of performing the Fourier transform, spatial frequency filtering and inverse Fourier transform. Using the modulation distributions of two grating patterns, we can reconstruct the 3D shape of the object. In the measurement process, we only need to capture one fringe pattern, so it is faster than the MMP and remains the advantages of it. In the article, the principle of this method, the setup of the measurement system, some simulations and primary experiment results are given. The simulative and experimental result proves it can restore the 3D shape of the complex object fast and comparatively accurate. Because only one fringe pattern is needed in the testing, our method has a promising extensive application prospect in real-time acquiring and dynamic measurement of 3D data of complex objects.     

倾斜式测量系统的傅里叶变换轮廓术研究

在传统傅里叶变换轮廓术的研究基础上,本文提出了一种倾斜式测量系统的傅里叶变换轮廓术,该技术放宽了传统傅里叶变换轮廓术测量系统的三个约束条件:CCD成像系统的光轴不需要与参考平面垂直,即有一定的倾斜度;投射系统的出瞳和CCD成像系统的入瞳中心之间的连线不需要与参考平面平行;投射系统的光轴和CCD成像系统的光轴不在同一平面内,且不交于参考平面上一点. 并且通过严格的理论分析,推导出高度与相位之间的关系式,与传统傅里叶变换轮廓术相比较,在保证一定的测量精度的前提下,倾斜式测量系统具有更强的实用性和可操作性. 关键词： 傅里叶变换轮廓术 倾斜式 测量系统 相位     

基于傅里叶变换轮廓术的动态液膜测量

动态液膜三维形貌的高速测量及重建,对于能源动力领域的工业过程优化十分重要。基于傅里叶变换轮廓术,对缓变表面和非缓变表面分别进行了模拟仿真,研究了物体表面形貌重建精度的影响因素,包括物体表面高度变化率、环境随机噪声以及条纹频率。并根据模拟结果对实验参数进行了优化,研发构建了高速三维结构光测量系统,对竖直壁面下降液膜表面形貌进行了动态测量。实验结果表明:随着液膜沿竖直壁面向下流动,液膜厚度呈现先增大后减小的趋势,高度方向的平均误差为0.1 mm,傅里叶变换轮廓术能够精确地应用于动态液膜高速测量。     

Effect of the nonlinearity of CCD in Fourier transform profilometry on spectrum overlapping and measurement accuracy

In Fourier transform profilometry (FTP), we must restrain spectrum overlapping caused by the nonlinearity of charge coupled device (CCD) and increase the measurement accuracy of object shape. Firstly, the causes of producing higher-order spectrum components and inducing spectrum overlapping are analysed theoretically, and simple physical explanation and analytical deduction are given. Secondly, aiming to suppress spectrum overlapping and improve measurement accuracy, the influence of spatial carrier frequency of projection grating on them is analysed. A method of increasing the spatial carrier frequency of projection grating to restrain or reduce the spectrum overlapping significantly is proposed. We then analyze the mechanism of how the spectrum overlapping is reduced. Finally, the simulation results and experimental measurements verify the correction of the theory and method proposed.     

Effect of the nonlinearity of the CCD in Fourier transform profilometry on spectrum overlapping and measurement accuracy

In Fourier transform profilometry (FTP), we must restrain spectrum overlapping caused by the nonlinearity of the charge coupled device (CCD) and increase the measurement accuracy of the object shape. Firstly, the causes of producing higher-order spectrum components and inducing spectrum overlapping are analysed theoretically, and a simple physical explanation and analytical deduction are given. Secondly, aiming to suppress spectrum overlapping and improve measurement accuracy, the influence of spatial carrier frequency of projection grating on them is analysed. A method of increasing the spatial carrier frequency of projection grating to restrain or reduce the spectrum overlapping significantly is proposed. We then analyze the mechanism of how the spectrum overlapping is reduced. Finally, the simulation results and experimental measurements verify the correction of the proposed theory and method.     

A novel compensation method for the measurement of radius of curvature

A test method for spherical mirrors with super-long radius of curvature that only one compensator is employed to measure the radii of curvature of both concave and convex mirrors is presented. With this testing system, the surface figure and radius of curvature of spherical mirrors can be measured simultaneously. Using the ABCD matrix method, a precise formula for radius of curvature calculation is deduced. Experimental results show that the relative measurement error of this method is less than 4.2×10⁻⁴.     

Lens distortion elimination for improving measurement accuracy of fringe projection profilometry

Fringe projection profilometry (FPP) is a powerful method for three-dimensional (3D) shape measurement. However, the measurement accuracy of the existing FPP is often hindered by the distortion of the lens used in FPP. In this paper, a simple and efficient method is presented to overcome this problem. First, the FPP system is calibrated as a stereovision system. Then, the camera lens distortion is eliminated by correcting the captured images. For the projector lens distortion, distorted fringe patterns are generated according to the lens distortion model. With these distorted fringe patterns, the projector can project undistorted fringe patterns, which means that the projector lens distortion is eliminated. Experimental results show that the proposed method can successfully eliminate the lens distortions of FPP and therefore improves its measurement accuracy.     

基于残差修剪的激光光斑高精度定位方法

为满足复杂靶标背景下激光光斑形心的高精度定位要求,提出了一种基于几何特征约束残差修剪的定位方法.首先通过分析成像特点提取激光光斑;然后在几何特征约束下对残差边缘进行二次修剪,优化边缘;最后利用最小二乘拟合法得到激光光斑形心的精确定位,并将其应用于火炮的重要静态参数--弯曲度测量.实验结果表明,该方法具有较强的稳定性,定位精度高且实时性好,与传统的定位方法相比,复杂靶标上激光光斑的水平和竖直定位偏差均由±1.2 pixel提高到±0.2 pixel,单次定位时间小于0.31 s,可实现复杂靶标背景下激光光斑形心的快速精确定位.