Use of digital color holography for crack investigation in electronic components

This paper presents the experimental optical analysis of the crack inside an electronic component. The optical setup is used to carry out multidimensional deformation measurements using digital color holography and the spatial multiplexing of holograms. Since the Fresnel transform method depends on wavelength, a wavelength-dependent-zero-padding algorithm is described and results in a rigorous sizing of each reconstructed monochrome image. The criterion to optimize the parameters is presented and is based on minimizing the widening of the impulse response of the full recording/reconstruction process. The application of the proposed method is illustrated through the analysis of the mechanical deformation of the electronic component, and offers keys to understand its failure mode in industrial conditions.     

Microscopic TV holography for MEMS deflection and 3-D surface profile characterization

Recent industrial demands for greater product quality in the fields of microelements and micro-electro-mechanical systems (MEMS) generate new challenges for metrology. The fast-growing MEMS industry requires a robust non-destructive quantitative measurement system for the characterization of their performance, reliability and integrity. A microscopic TV holographic system using a long working distance microscope with an extended zoom range has been developed for microelements and MEMS deformation and 3-D surface profile analysis. The system is capable of evaluating both rough and smooth surfaces. Noisy wrapped phase map is a usual problem in speckle interferometry. We have compared several phase-shifting algorithms for evaluation of speckle phase for their usefulness in generating less-noisy phase maps. The experimental results on a MEMS pressure sensor for out-of-plane deflection and 3-D surface profile analysis are presented.     

High-resolution dynamic measurement using electronic speckle pattern interferometry based on multi-camera technology

The speckle interferometer based on multi-camera technologies using two cameras is applied to a dynamic measurement. The new speckle interferometer is constructed by a prism array and two cameras. A phenomenon, which a bearing-ball collides against a thin polymer film, is investigated by the proposed interferometer. Then, it is shown that the local maximum deformation of the thin film by the collision is about 1.0 μm. Such a deformation process can precisely be analyzed by this method without any troubles of optical dislocations. In the results, it is confirmed that a large deformation process can be analyzed by accumulating measured results of small deformation in every small continuous analysis. Furthermore, it is estimated that the measurement precision of this method is about 5 nm as experimental results.     

Examination of the upper measurement limit in displacement measurement using fringe compensation in digital holography

Digital holography is a widely used method for displacement measurement in coherent optical metrology. An obvious limit of the method is that too large displacements result in dense fringes, so the fringes are practically invisible. The maximum number of contour fringes in displacement measurement is limited, because the cameras are discrete devices and sampling theory plays an important role. Because of the limited measurement range, compensation methods are promising tools for practical measurements. It can be shown that the practical measurement range can be extended above the Nyquist sampling limit. Compensation methods can be digital, because digital holographic interferometry operates with images recorded with a digital camera. In our research work the upper measurement range of fringe compensation method was examined. Our goal was to perform automatic compensation even if the displacement is higher than the measurement range of the basic method. The operation of the automatic fringe compensation method was based on the combination of two types of out-of-plane displacement measurements with different sensitivities.     

雾化场光学全息与数字全息联合测量

针对雾化场光学全息测量存在干板湿化学处理繁琐、再现像采集耗时的问题,提出光学全息与数字全息联合测量的方法,建立由同轴光学全息、同轴数字全息以及数字延迟信号发生器组成的测量系统,并以双孔直射式喷嘴产生的雾化场为测量对象,利用该测量系统在一次测量中同时获得雾化场的光学全息和数字全息的再现图像,两者具有很好的一致性。光学和数字再现图像相对应的视场范围分别为27.87 mm4.77 mm和27.59 mm6.67 mm,数字方式获得视场范围内单一层面再现像的时间仅为8 s,而光学方式将近1 h。结果表明,光学全息与数字全息联合测量时,通过数字全息的雾化再现图像能够对实验总体效果进行实时评估,提高了雾化场全息测量的实验效率。     

同轴全息术用于粒子场测量的数值模拟

 采用数值方法模拟了同轴全息术测量粒子场的过程,对两种不同的数值算法＿直接傅里叶变换算法和卷积算法,进行了分析和比较,结果表明卷积算法符合实际要求。分析了记录图像的空间频谱及其对图像采样频率的要求,得出了在记录波长、采样间隔等条件一定的情况下的最小记录距离。对于一幅512×512像素的数字图像,若像元尺寸为6.7 μm,所用光波长为532 nm,则最小记录距离为43.2 mm。在此基础上对实验记录的振幅和相位型静态粒子的数字全息图,均得到了满意的数值再现像。     

同轴全息术用于粒子场测量的数值模拟

采用数值方法模拟了同轴全息术测量粒子场的过程,对两种不同的数值算法＿直接傅里叶变换算法和卷积算法,进行了分析和比较,结果表明卷积算法符合实际要求。分析了记录图像的空间频谱及其对图像采样频率的要求,得出了在记录波长、采样间隔等条件一定的情况下的最小记录距离。对于一幅512×512像素的数字图像,若像元尺寸为6.7 μm,所用光波长为532 nm,则最小记录距离为43.2 mm。在此基础上对实验记录的振幅和相位型静态粒子的数字全息图,均得到了满意的数值再现像。     

表面粗糙度数字全息检测

鉴于数字全息表面粗糙度测量是对被记录的数字全息图进行数值重建获得相应的相位值,将其映射为表面轮廓值后来计算表面粗糙度参数的,分别以标准分辨率板和高度标定板为检测样本,对构建的数字全息测量系统进行了重建误差及重复性测试,包括横向尺寸误差及高度误差,横向尺寸重建误差及重复误差分别为1.11%和0.61%,高度重建误差及重复误差分别为11%和1.8%。以宽带介质膜平面反射镜为样本,测得其3段评定长度（包含15个取样长度）的表面粗糙度平均值分别为0.010 37 m、0.010 33 m和0.009 67 m。     

Potential of digital holography in particle measurement

This paper describes the potential power of digital holography in particle measurement and its expected development in the near future. In digital holography, image reconstruction is carried out numerically on a computer using observed hologram patterns and some quantitative information can be derived from the reconstructed images. In this paper, the basic concept and procedure of digital in-line holography are shown mainly for particle depth measurement and the performance test results obtained in numerical simulations and experiments are demonstrated to examine the potential of the present method.     

采用振速测量的改进统计最优近场声全息方法

针对常规统计最优近场声全息在空间多源声场重建过程中所需波函数项数多、重建精度不理想的问题,本文提出了一种基于振速测量的改进统计最优近场声全息算法。与常规算法不同,改进算法主要根据声源特点选取合适的波函数组合来计算声场传递矩阵。通过数值仿真初步验证了该方法的准确性和有效性,并与常规算法进行了详细的对比分析。仿真结果表明,改进算法重建精度高,随频率的变化相对误差波动较小,且随着频率的增大相对误差有逐渐减小的趋势;此外,不同的波函数组合,重建效果差异很大,当选取的波函数与声源共形且数量一致时重建效果最好。     

Electro-optic holography fringe control using diode laser current modulation

Electro-optic holography (EOH) is a whole field, laser-based, vibration measurement technique. Highly dense, unresolvable fringe patterns often limit the EOH measurement range. This paper presents a technique for increasing the measurement range of an EOH system using diode laser current modulation. This technique is known as frequency translated electro-optic holography (FTEOH). Using diode laser current modulation, the fringe patterns are based on higher-order Bessel functions and the sensitivity of the EOH system can either be increased or decreased. The amount of sensitivity reduction is limited only by the frequency limit of the signal generator that modulates the current supplied to the diode laser. EOH and FTEOH experimental results are presented and shown to closely compare.     

High-resolution digital transmission microscopy—a Fourier holography approach

A spherical reference field is used to construct a digital holographic system with a demonstrated resolution up to 228 line pairs per mm. The reference field originates from a GRIN lens placed 1 mm from the illuminated object. This allows the use of a standard sensor to record the hologram with the required numerical aperture. The image is determined by evaluation of the Rayleigh–Sommerfeld diffraction integral that relates the object field in the image plane to the object field in the sensor plane. Experimental results are given for two charge coupled device sensors and one complementary metal-oxide-semiconductor active pixel sensor.     

Cross-talk prevention in optical dynamic measurement

In interferometry-based optical dynamic measurement, single high-speed camera or photodetector is normally adopted to avoid critical alignment and synchronization problems. Due to the rapid development of high-speed cameras and photodetectors, the signal obtained is sufficient to encode different dynamic informations. However, cross-talk problem always exists. In order to avoid the influence of cross-talk, well-designed carriers must be adopted in either spatial or temporal domain. In this paper, we will present two applications on cross-talk prevention in optical dynamic measurement. The first one is a camera-based dual-wavelength image-plane digital holography. In this application, the direction of two spatial carriers is designed to encode information of two wavelengths at different areas of the spectrum. Two phase maps can be retrieved from one hologram. The second application is a spatially encoded multi-beam laser Doppler vibrometry using a single detector. It encodes vibration information of 20 points on separated frequency ranges. Three methods that can bypass the cross-talk are discussed. The experiment verifies it is possible to do a precise vibration measurement on a 4×5 matrix simultaneously using a single photodetector.     

Pulsed TV holography and tomography for the study of transient waves in air

Transient waves in air are recorded and reconstructed using pulsed TV holography and computerized tomography (CT). Experiments are performed with an electrical discharge between two electrodes as the acoustic wave source. The free space wave-fronts and pressure fields are reconstructed. Waves reflected and diffracted by different obstacles are also recorded and reconstructed in three dimensions. Speckle averaging and image processing techniques are used to get the high quality projection fields needed for CT reconstruction.     

Long distance real-time measurement of multi-points micro-vibration in region by digital holography

Many applications require micro-vibration measurement, especially multi-points detection at long distance in real-time. In this paper, a micro-vibration measurement approach based on digital holographic interferometry is proposed for middle-low frequency detection. It can be used to monitor irregular frequency/amplitude vibration in selected region over 10 m away simultaneously and synchronously. A series of experiments were conducted including real-time measurement of 300 Hz, 1 kHz, 2 kHz and 3 kHz constant frequency/amplitude periodic vibration, precision and frequency response tests with calibration of LDV, 1 kHz irregular amplitude vibration, irregular frequency/amplitude vibration as well as the real-time measurement and simultaneous display of multi-points vibration. The experimental results demonstrate the feasibility of the proposed method and reveal its unique advantages.     

Lens distortion elimination for improving measurement accuracy of fringe projection profilometry

Fringe projection profilometry (FPP) is a powerful method for three-dimensional (3D) shape measurement. However, the measurement accuracy of the existing FPP is often hindered by the distortion of the lens used in FPP. In this paper, a simple and efficient method is presented to overcome this problem. First, the FPP system is calibrated as a stereovision system. Then, the camera lens distortion is eliminated by correcting the captured images. For the projector lens distortion, distorted fringe patterns are generated according to the lens distortion model. With these distorted fringe patterns, the projector can project undistorted fringe patterns, which means that the projector lens distortion is eliminated. Experimental results show that the proposed method can successfully eliminate the lens distortions of FPP and therefore improves its measurement accuracy.     

A flexible fast 3D profilometry based on modulation measurement

This paper proposes a flexible fast profilometry based on modulation measurement. Two orthogonal gratings through a beam splitter are vertically projected on an object surface, and the measured object is placed between the imaging planes of the two gratings. Then the image of the object surface modulated by the orthogonal gratings can be obtained by a CCD camera in the same direction as the grating projection. This image is processed by the operations consisting of performing the Fourier transform, spatial frequency filtering and inverse Fourier transform. Using the modulation distributions of two grating patterns, we can reconstruct the 3D shape of the object. In the measurement process, we only need to capture one fringe pattern, so it is faster than the MMP and remains the advantages of it. In the article, the principle of this method, the setup of the measurement system, some simulations and primary experiment results are given. The simulative and experimental result proves it can restore the 3D shape of the complex object fast and comparatively accurate. Because only one fringe pattern is needed in the testing, our method has a promising extensive application prospect in real-time acquiring and dynamic measurement of 3D data of complex objects.     

Transient vibration measurements using multi-pulse digital holography

An optical system for the evaluation of transient deformations will be described. In order to increase the temporal resolution, a ruby laser producing four pulses has been used. Four separate digital holograms (one hologram for each pulse) of the test object are recorded in a few microseconds on three CCD sensors. The Fourier method is used for the quantitative evaluation of the digital holograms. The phases are obtained from the complex amplitudes, and the deformation at different times is calculated from phase subtraction. Experimental results are presented.     

基于神经网络的近场声全息方法研究

研究了用于声源识别的近场声全息方法中的声场重建算法,针对一般声场重建算法速度慢、误差大的缺点,提出了基于RBF神经网络的声场重建算法。通过仿真证明:相比较于常用的利用菲涅尔变换推导的声全息重建算法,该重建算法具有重建误差小、速度快的优点,具有较好的可行性。     

Information reduction using lensless Fourier transform digital composite holography

An optical hologram contains substantially more information than necessary for some specific applications. Practical methodology of handling huge information contents in these holograms for such applications is cumbersome. In this paper, a method of information reduction, which aims at efficient storage and transmission of holograms, is investigated using digital composite holography in lensless Fourier transform configuration. The maximum information reduction factor obtained in our experiment is 105. The advantages/disadvantages of this method over an earlier method used in optical holography [Lin LH. A method of hologram information reduction by spatial frequency sampling. Appl Opt 1968;7:545] are also discussed.