PDMS微流体系统的加工制作

目前，微流体装置越来越多地应用到分析系统、生物医学、化学等基础研究领域。传统的微流体系统制作方法是对玻璃和硅片进行刻蚀。用软刻法制作PDMS(Poly(dimethylsiloxane)：聚二甲基硅氧烷)微流体装置比传统的制作方法更快速，成本更低廉，并且对于通道的密封也不需要玻璃或硅芯片键合密封等复杂工艺。这类软刻法的核心技术是快速原样制作法和复制压模技术。相对于微电子加工工艺，软刻法制作过程不需要超静环境，化学家和生物学家可在普通的实验室实现加工制作。本文介绍了PDMS微装置在分离和生物材料模式化等方面的应用。

Fabrication of Microfluidic Systems in Poly(dimethylsiloxane)

Microfluidic deivices have increasing application as analytical system s, biomedical devices, tools for chemistry and biochemistry, and systems for fun damental research. Conventional methods of fabricating microfluidic devices have focused on etching in glass and silicon. Fabrication of microfluidic devices in poly(dimethylsiloxane)(PDMS) by soft lithography provides faster, less expensiv e routes than these conventional methods. These soft-lithographic methods are b ased on rapid prototyping and replica molding. At the same time, they are also m ore accessible for chemists and biologists to work under benchtop conditions bec ause devices do not need to be fabricated in a cleanroom using soft lithography. This paper describes devices fabricated in PDMS for separations and patterning of biological material.