| 单晶MgO基片超精密加工技术研究 |
| |
| 引用本文： | 董志刚,康仁科,金洙吉,王宁会.单晶MgO基片超精密加工技术研究[J].人工晶体学报,2006,35(6):1372-1377. |
| |
| 作者姓名： | 董志刚 康仁科 金洙吉 王宁会 |
| |
| 作者单位： | 大连理工大学精密与特种加工教育部重点实验室,大连,116024;大连理工大学静电与特种电源研究所,大连,116024 |
| |
| 基金项目： | 国家自然科学基金(No.50475149)，教育部科技研究重点项目(No.105053)，辽宁省科技计划项目(No.2004222001)资助 |
| |
| 摘 要： | 单晶MgO具有良好的物理化学性能及光学性能,是性能优异的薄膜基片及光学零件材料,广泛应用于高温超导、航空航天、光电技术等领域.用作薄膜生长的基片必须具有高精度超光滑无损伤的表面,而单晶MgO是典型的硬脆难加工材料,这对MgO晶体的超精密加工技术提出了很高的要求.本文介绍了单晶MgO的特性及其应用领域,针对高温超导薄膜制备对MgO基片的要求,讨论了现有的MgO基片加工工艺存在的问题,分析了几种可用于MgO基片超精密加工的先进工艺技术的特点和应用研究现状.
|
| 关 键 词： | 单晶MgO 基片 研磨 磨削 抛光 |
| 文章编号： | 1000-985X（2006）06-1372-06 |
| 收稿时间： | 04 18 2006 12:00AM |
| 修稿时间： | 2006-04-182006-07-19 |
Application and Ultraprecision Machining Technology of MgO Single Crystal |
| |
| DONG Zhi-gang,KANG Ren-ke,JIN Zhu-ji,WANG Ning-hui.Application and Ultraprecision Machining Technology of MgO Single Crystal[J].Journal of Synthetic Crystals,2006,35(6):1372-1377. |
| |
| Authors: | DONG Zhi-gang KANG Ren-ke JIN Zhu-ji WANG Ning-hui |
| |
| Institution: | 1. Key Laborator,/of Precision and Non-tradltional Machining of Ministry of Education, Dalian University of Technology,Dalian 116024, China; 2. Institute of Electrostatics and Special Power Supply, Dalian University of Technology, Dalian 116024, China |
| |
| Abstract: | MgO single crystal has been widely used as optical part and film substrate material in the field of high temperature superconductor,aerospace and photoelectron fields owing to its excellent optical,physical and chemical properties.The surface of substrate for films deposition is required to be high precision,ultra smooth and non-destructive.However,MgO single crystal is hard,brittle and easy to cleavage material,it is necessary to investigate advanced machining technology of MgO single crystal substrate.In this paper,the present precision machining technologies of MgO substrate are discussed,and advanced precision and ultraprecision machining technologies are presented. |
| |
| Keywords: | MgO substrate lapping grinding polishing |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《人工晶体学报》浏览原始摘要信息 |
| 点击此处可从《人工晶体学报》下载免费的PDF全文 |
|
