数字全息计量技术及其在微小位移测量中的应用

数字全息是用数字的方式记录和处理全息图像，避免了传统全息照相的化学处理，既简化了处理过程，更便于用数字图像处理的方式来改进图像质量和提取信息。数字全息干涉计量技术是一种全场、非接触的光学测量方法，该方法测量精度高，光路简单，对防振要求低，实验条件容易满足，特别适合微小物体的微小位移或变形的精确测量。本文运用数字全息干涉计量法测定了两端固支梁的微小离面位移；经实验验证数字全息计量术能精确测量物体0．01微米量级位移或变形；而且该方法可靠性好、成本低；是非接触的无损测量。数字全息计量技术的这些特点使得该技术在小物体的微小变形测量上具有特别的优越性，因而在MEMS结构及MEMS材料参数(如弹性模量、泊松比、热变形系数等)的测定中有广阔的应用前景。

Digit Hologram Metrology Technique and Its Application In The Small Strain Measurement

The digital hologram interference measuring technique (DHIMT) is the way of recording and processing the holographic image by digital method. The traditional chemical processing is avoided, so that the processing is simplified. It is more convenient to improve the quality of the image and to obtain the needed information. The digital hologram interference measuring technique (DHIMT) is a kind of optical method with high precise, nondestructive and full field measuring. The Optic arrangement of DHIMT is simple and the demand for isolation vibration is relative low compare to photographic film, so the experiment condition of DHIMT is easily satisfied. It is specially suitable to the precise measurement of small strain in small elements. The DHIMT technique is applied to measure the small strain of a beam in this paper. The experimental results show that displacement measurement sensitivity of 0.01 micron could be obtained. Therefore the method is a power tool for small displacement and strain measurements of small objects.