静电悬浮转子微陀螺及其关键技术

静电悬浮转子微陀螺具有比振动式微陀螺精度高的潜在优点，并可同时测量二轴角速度和三轴线加速度。介绍了静电悬浮转子微陀螺的研究现状。对该静电悬浮转子微F1螺／加速度计的工作原理、特点进行了分析，并对实现高精度静电悬浮转子微陀螺／加速度计晌关键技术如静电稳定悬浮、微位移检测控制、静电恒速旋转驱动、微机械加工和真空封装技术等进行了探讨。指出这一新颖MEMS陀螺是高精度多轴集成微惯性传感器技术发展的一个重要方向，具有广阔的应用前号和较大的发展潜力。

Micro Gyroscope Based on Electrostatically Levitated Rotor and its Key Techniques

Micro-machined rotational gyroscope has potential advantage of more accurate than the prevailing micro-machined vibratory gyroscopes,which is based on an electrostatically levitated rotor and can work as a dual-axis gyroscope and a tri-axis accelerometer simultaneously.Research status of this novel micro-gyro is briefly reported.The working principles of rotational micro-gyro/ accelerometer and its characteristics are presented.The key techniques for realizing high performance of this micro-gyro/accelerometer,such as electrostatic stable levitation,micro displacement detection and control,rotation driving and speed control,structure micro-machining and vacuum packaging,are investigated.It is pointed out that,in developing high precision micro-machined inertial multi-sensor,this novel MEMS gyroscope is an important candidate,and will be well developed in near future due to its wide prospects of applications.