| 硅微机械陀螺传感器信号的检测方法 |
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| 引用本文： | 凌林本,李滋刚,周百令,熊正南.硅微机械陀螺传感器信号的检测方法[J].中国惯性技术学报,1999(4). |
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| 作者姓名： | 凌林本 李滋刚 周百令 熊正南 |
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| 作者单位： | 东南大学!南京210096 |
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| 摘 要： | 硅微机械陀螺是近几年发展起来的一种新型惯性元件。由于其巨大的军事和民用价值，各国均将研制过程中的关键技术列为高度机密。本文对硅微机械陀螺的关键技术之一 传感器信号的检测方法进行了探讨。提供了几种硅微机械陀螺传感器信号的检测方法，并对这几种检测方法进行了比较。
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| 关 键 词： | 硅微机械陀螺 信号检测 电容式传感器 |
The Methods Used to Detect the Sensor Signal of the Silicon Micromechanical Gyro |
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| LING linben,LI Zigang,ZHOU Bailing,XIONG Zhengnan.The Methods Used to Detect the Sensor Signal of the Silicon Micromechanical Gyro[J].Journal of Chinese Inertial Technology,1999(4). |
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| Authors: | LING linben LI Zigang ZHOU Bailing XIONG Zhengnan |
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| Abstract: | Silicon micromechanical gyro is a new type of inertial sensor developed in resent years.For its great value both in army and civil use,all of the countries kept its key techniques in high secrete archives.In this paper,the sensor signal detecting methods,one of the key techiques in making silicon micro gyro,are provided and compared each other. |
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| Keywords: | silicon micro mechanical gyro signal detection capacitance type sensor |
| 本文献已被 CNKI 等数据库收录！ |
