Laser generated microstructures

Deposition and etching processes based on the interaction of laser light with a substrate surface and molecules of the surrounding ambient are discussed in this tutorial review. This laser writing approach is based on photolytic, pyrolytic, or photoelectrochemical microreactions. The fundamental properties of such reactions and corresponding processing parameters (e.g. deposition or etch rate, resolution) are discussed. Important published results for deposition by photolysis, pyrolysis, and etching are summarized in the form of tables. A special list of potential applications for such techniques and a list of all materials used thus far for laser deposition and etching are included.