Ultraviolet detectors based on ZnO films by thermal oxidation of Zn metallic films |
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| Authors: | Xue Gang Zheng Qing Shan Li |
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| Institution: | (1) Department of Physics, Linyi Normal University, Shandong, 276005, PR China;(2) Department of Physics, Qufu Normal University, Shandong, 273165, PR China;(3) Ludong University, Shandong, 264025, PR China |
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| Abstract: | Metallic Zn films were deposited on glass substrates by electron-beam evaporation. ZnO films were synthesized by thermal oxidation
of Zn metallic films in air. At the annealing temperature of 550 °C, ZnO nanowires appeared on the surface, which mainly result
from the decrease of oxidation rate. A ZnO ultraviolet photodetector was fabricated based on a metal-semiconductor-metal planar
structure. The detector showed a large UV photoresponse with an increase of two orders of magnitude. It is concluded that
promising UV detectors can be obtained on ZnO films by thermal oxidation of Zn metallic films. The ways of performing spectral
response measurements for polycrystalline ZnO films are also discussed.
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| Keywords: | ZnO Ultraviolet detectors nanowires thermal oxidation |
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