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Cs^+-K^+ Exchange in Z-Cut KTiOPO4 Crystal Covered with Chromium Masking Layer
引用本文:张瑞锋,;卢霏,;连洁,;刘汉平,;刘祥志,;王亮玲,;王克明,;路庆明.Cs^+-K^+ Exchange in Z-Cut KTiOPO4 Crystal Covered with Chromium Masking Layer[J].中国物理快报,2008,25(6):2281-2284.
作者姓名:张瑞锋  ;卢霏  ;连洁  ;刘汉平  ;刘祥志  ;王亮玲  ;王克明  ;路庆明
作者单位:[1]School of Information Science and Engineering, Shandong University, Jinan 250100; [2]School of Physics and Microelectronics, Shandong University, Jinan 250100; [3]School of Chemistry and Chemical Engineering, Shandong University, Jinan 250100
基金项目:Supported by the Research Fund for the Doctoral Programme of Higher Education of China under Grant No 20070422078.
摘    要:Cs^+-K^+ ion exchanges are performed on z-cut KTiOPO4 crystals with chromium coating covered. The temperature of ion exchange is 430℃, and the time range from 15min to 30min. The dark mode spectra of the samples are measured by the prism coupling method. The channel structures on the samples are observed by a microscope and the near field pattern of the channel waveguides are measured by the end-fire coupling method. The refractive index of the samples increases and the increments at surface are modulated due to the existence of Cr film. In the region covered by Cr film, the refractive index of the samples at the surface increases dramatically in a shallow layer. The results of energy dispersive x-ray spectra indicate that in the region covered with Cr film, Cr ions participate in the ion exchange process, and enhance the refractive index. The results may provide a possibility that achieves index enhancement and Cr doping synchronically.

关 键 词:  光刻掩蔽层  KTiOPO4晶体      离子交换
收稿时间:2008-2-27

Cs+-K+ Exchange in Z-Cut KTiOPO4 Crystal Covered with Chromium Masking Layer
ZHANG Rui-Feng,LU Fei,LIAN Jie,LIU Han-Ping,LIU Xiang-Zhi,WANG Liang-Ling,WANG Ke-Ming,LU Qing-Ming.Cs+-K+ Exchange in Z-Cut KTiOPO4 Crystal Covered with Chromium Masking Layer[J].Chinese Physics Letters,2008,25(6):2281-2284.
Authors:ZHANG Rui-Feng  LU Fei  LIAN Jie  LIU Han-Ping  LIU Xiang-Zhi  WANG Liang-Ling  WANG Ke-Ming  LU Qing-Ming
Institution:School of Information Science and Engineering, Shandong University, Jinan 250100School of Physics and Microelectronics, Shandong University, Jinan 250100School of Chemistry and Chemical Engineering, Shandong University, Jinan 250100
Abstract:Cs+--K+ ion exchanges are performed on z-cut KTiOPO4 crystals with chromium coating covered. The temperature of ion exchange is 430°C, and the time range from 15min to 30min. The dark mode spectra of the samples are measured by the prism coupling method. The channel structures on the samples are observed by a microscope and the near field pattern of the channel waveguides are measured by the end-fire coupling method. The refractive index of the samples increases and the increments at surface are modulated due to the existence of Cr film. In the region covered by Cr film, the refractive index of the samples at the surface increases dramatically in a shallow layer. The results of energy dispersive x-ray spectra indicate that in the region covered with Cr film, Cr ions participate in the ion exchange process, and enhance the refractive index. The results may provide a possibility that achieves index enhancement and Cr doping synchronically.
Keywords:82  39  82" target="_blank">Wj')">82  39  Wj  42  79  Gn  m 42" target="_blank">')">m 42  70  Mp
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