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Stress Analysis of ZnO Film with a GaN Buffer Layer on Sapphire Substrate |
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| Authors: | CUI Jun-Peng WANG Xiao-Feng DUAN Yao HE Jin-Xiao ZENG Yi-Ping |
| Institution: | [1]Key Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083; [2]Materials Science Center, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083 |
| Abstract: | |
| Keywords: | 81 15 Hi 61 14 Hg 61 14 Lj |
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