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Effect of Process Parameters on Laser Damage Threshold of TiO2 Coatings
作者姓名:姚建可  晋云霞  赵元安  贺洪波  邵建达  范正修
作者单位:[1]P&D Centre for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800 [2]Graduate School, Chinese Academy of Sciences, Beijing 100080
基金项目:Supported by the National Natural Science Foundation of China under Grant No 60608020.
摘    要:We investigate the laser damage behaviour of an electron-beam-deposited TiO2 monolayer at different process parameters. The optical properties, chemical composition, surface defects, absorption and laser-induced damage threshold (LIDT) of films are measured. It is found that TiO2 films with the minimum absorption and the highest LIDT can be fabricated using a TiO2 starting material after annealing. LIDT is mainly related to absorption and is influenced by the non-stoichiometric defects for TiO2 films. Surface defects show no evident effects on LIDT in this experiment.

关 键 词:参数  阈值  TiO2  涂料
收稿时间:2007-3-2
修稿时间:2007-03-02

Effect of Process Parameters on Laser Damage Threshold of TiO2 Coatings
YAO Jian-Ke,JIN Yun-Xia,ZHAO Yuan-An,HE Hong-Bo,SHAO Jian-Da,FAN Zheng-Xiu.Effect of Process Parameters on Laser Damage Threshold of TiO2 Coatings[J].Chinese Physics Letters,2007,24(9):2606-2608.
Authors:YAO Jian-Ke  JIN Yun-Xia  ZHAO Yuan-An  HE Hong-Bo  SHAO Jian-Da  FAN Zheng-Xiu
Institution:1 RggD Centre for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800; 2 Graduate School, Chinese Academy of Sciences, Beijing 100080
Abstract:We investigate the laser damage behaviour of an electron-beam-deposited TiO2 monolayer at different process parameters. The optical properties, chemical composition, surface defects, absorption and laser-induced damage threshold (LIDT) of films are measured. It is found that TiO2 films with the minimum absorption and the highest LIDT can be fabricated using a TiO2 starting material after annealing. LIDT is mainly related to absorption and is influenced by the non-stoichiometric defects for TiO2 films. Surface defects show no evident effects on LIDT in this experiment.
Keywords:42  79  Wc  68  37  Yz  68  60  Wm
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