Fraunhofer diffraction on a polygon and calculation of binary mask images |
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| Authors: | G V Belokopytov and Yu V Ryzhikova |
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| Institution: | (1) Department of Oscillation Physics, Faculty of Physics, Moscow State University, Moscow, 119992, Russia |
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| Abstract: | A simple analytical formula for the spectrum of spatial harmonic components of a diffracted field is derived. It is used for construction of an effective algorithm of image calculation in photolithography. |
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| Keywords: | photolithography mask Fraunhofer diffraction |
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