| 利用光纤共焦扫描显微镜的轴向响应曲线测定压电陶瓷的逆压电伸缩效应 |
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| 引用本文： | 刘力,杨莉松,王桂英,徐至展.利用光纤共焦扫描显微镜的轴向响应曲线测定压电陶瓷的逆压电伸缩效应[J].光学学报,2001,21(3):80-382. |
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| 作者姓名： | 刘力 杨莉松 王桂英 徐至展 |
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| 作者单位： | 中国科学院上海光学精密机械研究所， 上海 201800 |
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| 基金项目： | 国家自然科学基金!(6 96 370 30、6 97770 0 4)资助项目 |
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| 摘 要： | 在光纤共焦扫描显微镜（FOCSM）的基础上，利用其轴向响应曲线的线性部分，给出了一种测定物体微位移的新方法。并用该方法精确测量了压电陶瓷微小的逆压电伸缩效应，分辨率可以达到5nm。
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| 关 键 词： | 轴向响应曲线 压电陶瓷 光纤共焦扫描显微镜 逆压电伸缩效应 测量 FOCSM |
Measurement of Converse Piezoelectric Expend and Contract of PZT with the Axial Response Curve of Fiber-Optical Confocal Scanning Imaging Microscope |
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| Liu Li,Yang Lisong,Wang Guiying,Xu Zhizhan.Measurement of Converse Piezoelectric Expend and Contract of PZT with the Axial Response Curve of Fiber-Optical Confocal Scanning Imaging Microscope[J].Acta Optica Sinica,2001,21(3):80-382. |
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| Authors: | Liu Li Yang Lisong Wang Guiying Xu Zhizhan |
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| Abstract: | By utilizing the axial response curve of fiber optical confocal scanning microscope, a new technique for measuring the micro position has been developed. Using this technique, the converse piezoelectric expend and contract of PZT with resolution as high as 5 nm was measured. |
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| Keywords: | confocal microscope axial response curve PZT |
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