子孔径拼接检测光学系统波前机械定位误差补偿算法

为了实现大口径光学系统波前子孔径拼接干涉测量，保证子孔径采样数据准确定位，提出了子孔径拼接定位补偿算法。介绍了该算法原理，分析了该算法子孔径定位误差补偿能力。首先根据被检光学系统和子孔径口径大小规划出采样子孔径布局，在子孔径采样装置机械精度误差范围内对子孔径进行拼接，根据所求子孔径定位误差补偿系数和调整误差系数，得到被检全孔径波前，完成大口径光学系统波前的拼接检测。通过仿真验证了该算法的可行性，在机械平移定位精度为1 mm和转动角定位精度为0.5°时，用该算法实验检测口径为200 mm的光学系统平面波前。检测结果表明该算法稳定可靠，能有效补偿机械精度引起的子孔径定位误差，从而可放宽对机械定位精度的要求。

Location Error Compensation Algorithm for Measuring Optical System Wave Front by Sub-Aperture Stitching

In order to realize sub-aperture stitching measurement of large optical wavfront, sub-aperture location compensation algorithm is introduced and the ability to compensate the mechanical location error is analyzed. Based on the aperture of the tested optical system and the sub-aperture, the layout of the sub-aperture is calculated. In the range of the mechanical location error, stitching the sub-aperture to get the location compensation coefficients and the adjusting error coefficients, the full aperture of the tested wavefront is got and the large optical wavefront is tested. The feasiblility of the algorithm is tested by the simulation, and the wavefront of the optical system with aperture of 200 nm is tested when the mechanical translation precision is 1 mm and rotation precision is 0.5°. The result indicates the stability of the algorithm and can effectively compensate the sub-aperturre location error caused by the mechanical, which can reduce the high requirement of the mechanical platform.