基于ANSYS提取单相单向换能器耦合模参数

基于有限元理论,给出了基于ANSYS提取单相单向换能器（Single Phase Unidirectional Transducers,SPUDT）耦合模参数的方法。首先,结合声表面波在压电介质中的传播原理,给出了压电有限元分析方程和对应的ANSYS分析步骤。然后针对SPUDT结构,给出了周期性近似分析的理论模型,利用耦合场分析对其进行模态分析和谐响应分析,最后结合两者的结果来计算SPUDT的耦合模参数。本文给出基底材料为压电晶体128°YX-LiNbO₃和YZ-LiNbO₃,电极材料为铝的三种不同SPUDT的计算结果,理论结果与Hashimoto和Hartmann文献报道的结果相吻合,并且和实验测试的结果基本一致。从而给出了提取SPUDT耦合模参数的一种通用、有效的方法。

COM parameters of a periodic array SPUDT extraction from numerical simulations by ANSYS

Based on Finite Element Method(FEM)theory,a universal numerical method was proposed to extract the Coupling-of-Modes parameter of a periodic array Single Phase Unidirectional Transducers(SPUDT)by ANSYS.Firstly,according to the theory about SAW propagation in piezoelectric media,the FE theory and corresponding ANSYS analysis procedure were presented.Then,Aiming at SPUDT structure,an approximate periodic finite element model was described.Both modal analysis and harmonic analysis were performed and we could m...