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| 不同形貌衬底上铝诱导poly-Si薄膜的制备及表征 | |
| 引用本文： | 王成龙,范多旺,刘红忠,张福甲,邢达,刘颂豪.不同形貌衬底上铝诱导poly-Si薄膜的制备及表征[J].光谱学与光谱分析,2009,29(3):752-755. |
| 作者姓名： | 王成龙 范多旺 刘红忠 张福甲 邢达 刘颂豪 |
| 作者单位： | 1. 兰州交通大学国家绿色镀膜技术与装备工程技术研究中心，甘肃 兰州 730070 2. 西安交通大学先进制造技术研究所，陕西 西安 710049 3. 兰州大学物理科学与技术学院，甘肃 兰州 730000 4. 华南师范大学信息光电子科技学院，广东 广州 510631 |
| 基金项目： | 教育部长江学者与创新团队计划项目，国家科技支撑计划，国家自然科学基金，兰州交通大学青蓝人才工程计划项目 |
| 摘 要： | 以表面平整、粗糙的玻璃为衬底，在不同衬底温度下直流磁控溅射沉积a-Si薄膜，制备成glass/a-Si/Al样品，经退火处理制备了poly-Si薄膜。分别采用Raman光谱、XRD光谱等手段研究了衬底粗糙度以及衬底温度对铝诱导晶化(AIC)制备的poly-Si品质的影响。Raman光谱表明：所有样品在521 cm-1都有尖锐、对称的Raman峰出现，表明样品完全结晶;XRD结果表明：poly-Si在(111)晶向择优生长;XRD在(111)处的半高宽值(FWHM)表明：玻璃衬底的形貌和a-Si沉积的温度对poly-Si的品质产生影响。200 ℃可能是AIC制备poly-Si薄膜时沉积a-Si时的最适温度。 |
| 关 键 词： | a-Si薄膜 粗糙度 衬底温度 晶化 AIC |
| 收稿时间： | 2007-11-28 |
Preparation and Characterization of Poly-Si Films on Different Topography Substrates by AIC |
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| WANG Cheng-long,FAN Duo-wang,LIU Hong-zhong,ZHANG Fu-jia,XING Da,LIU Song-hao.Preparation and Characterization of Poly-Si Films on Different Topography Substrates by AIC[J].Spectroscopy and Spectral Analysis,2009,29(3):752-755. | |
| Authors: | WANG Cheng-long FAN Duo-wang LIU Hong-zhong ZHANG Fu-jia XING Da LIU Song-hao |
| Institution: | 1. National Engineering Research Center for Technology and Equipment of Environmental Deposition, Lanzhou Jiaotong University, Lanzhou 730070, China2. State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China3. Institute of Physics Science and Technology, Lanzhou University, Lanzhou 730000, China4. School for Information and Optoelectronic Science and Engineering, South China Normal University, Guangzhou 510631, China |
| Abstract: | Polycrystalline silicon(poly-Si) thin-films were made on planar and textured glass substrates by aluminum-induced crystallization(AIC) of in situ amorphous silicon(a-Si) deposited by DC-magnetron.The poly-Si films were characterized by Raman spectroscopy,X-ray diffraction(XRD) and atomic force microscopy(AFM).A narrow and symmetrical Ranman peak at the wave number of about 521 cm-1 was observed for all samples,indicating that the films were fully crystallized.XRD results show that the crystallites in the au... |
| Keywords: | AIC |
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