BCxN薄膜的紫外透过光谱研究

利用射频磁控溅射方法以不同的溅射功率(80～130 W)制备出具备紫外增透性能的BCN,BC2N和BC3N薄膜.傅里叶红外吸收光谱和X射线光电子能谱测量发现样品的组成原子之间均实现了原子级化合.溅射功率对薄膜的组分和紫外增透性能有很大影响,其通过改变薄膜组分而影响紫外增透性能,且碳原子数小的样品紫外增透性能好.以110 W条件下制备的BCN薄膜中碳原子数最小,它的紫外增透性能最好,在200～350 nm波段附近平均透过率比玻璃提高了将近40%.

Ultraviolet Transmission Spectra of BCxN Thin Films

BCN, BC_2N and BC_3N thin films with transmission increasing properties in the ultraviolet region were deposited by RF magnetron sputtering with different sputtering power (80-130 W). Fourier transform infrared absorption and X-ray photoelectron spectroscopy results suggested that the films were atomic-level hybrids composed of B, C and N atoms. The compositions and transmission increasing properties of samples in the ultraviolet region were strongly influenced by sputtering power, which determined the transmission increasing properties in the ultraviolet region by changing compositions. And the lower the atomic number of C in the thin films, the better the transmission increasing properties in the ultraviolet region. The BCN thin films deposited at the sputtering power of 110 W possessed the lowest atomic number of C and the best transmission increasing properties in the ultraviolet region. And the increase in average transmissivity from 200 to 350 nm was about 40% compared with glass.