| 衬底对原位氧化制备的ZnO薄膜结构和光学性质的影响 |
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| 引用本文： | 张军,谢二庆,谢毅柱,付玉军,邵乐喜.衬底对原位氧化制备的ZnO薄膜结构和光学性质的影响[J].强激光与粒子束,2008,20(4):657-660. |
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| 作者姓名： | 张军 谢二庆 谢毅柱 付玉军 邵乐喜 |
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| 作者单位： | 1. 湛江师范学院 物理科学与技术学院，湛江 524048; 2． 兰州大学 物理科学与技术学院，兰州 730000 |
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| 基金项目： | 广东省自然科学基金
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湛江师范学院校科研和教改项目 |
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| 摘 要： | 采用射频反应溅射法在不同衬底上制备Zn3N2薄膜，然后对其原位氧化制备ZnO薄膜。利用X射线衍射分析(XRD)、扫描电子显微镜(SEM)和光致发光谱(PL)等表征技术研究了不同衬底对ZnO薄膜的结晶特性和发光性能的影响。XRD研究结果显示:Zn3N2薄膜在500 ℃原位氧化3 h后完全转变为ZnO薄膜，在玻璃和熔融石英衬底上制备的多晶ZnO薄膜无择优取向，而单晶硅（100）衬底上的多晶ZnO薄膜具有较好的沿（002）方向的择优取向。PL测试结果显示:硅和熔融石英衬底上的多晶ZnO薄膜发光性能良好，激子复合产生的紫外发光峰很强，且半高宽较窄，而来自于深能级发射的绿色发光峰很弱；而玻璃衬底上的多晶ZnO薄膜发光性能较差。
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| 关 键 词： | ZnO薄膜 Zn3N2薄膜 原位氧化 光致发光 衬底 |
| 收稿时间： | 2008/1/2 |
Effects of substrate on ZnO thin films prepared by in situ oxidation of Zn3N2 |
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| ZHANG Jun,XIE Er-qing,XIE Yi-zhu,FU Yu-jun,SHAO Le-xi.Effects of substrate on ZnO thin films prepared by in situ oxidation of Zn3N2[J].High Power Laser and Particle Beams,2008,20(4):657-660. |
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| Authors: | ZHANG Jun XIE Er-qing XIE Yi-zhu FU Yu-jun SHAO Le-xi |
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| Institution: | 1. School of Physical Science and Technology, Zhanjiang Normal Universtiy, Zhanjiang 524048, China; 2. School of Physical Science and Technology, Lanzhou University, Lanzhou 730000, China |
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| Abstract: | ZnO thin films on various substrates were prepared by in situ oxidation of RF sputtered Zn3N2 films. The structural and photoluminscent properties of ZnO films were measured by X-ray diffraction (XRD), scanning electron microscopy (SEM) and photoluminescence (PL). XRD results showed that Zn3N2 films had been completely transformed into ZnO films after in situ oxidization at 500 ℃ for 3 h. The films on glass and fused silica glass substrates had no preferential orientation while the films on Si (100) substrates exhibited (002)axis preferred orientation. PL measurements showed that ZnO films on Si (100) and fused silica glass substrates possessed good photoluminscent properties with strong near band edge excitonic UV emission and weak defect-related deep-level emission in the visible region |
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| Keywords: | Zn3N2 films In situ oxidation Photoluminescence Substrate |
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