阵列探测器对斜入射激光的功率测量不确定度

为了对斜入射情况下的激光功率进行准确测量，采用了对阵列探测器的功率响应度依角度进行修正的方法。推导了依赖于光源位置、阵列探测器位置和阵列探测器姿态角的激光光线方向余弦和入射角的数学表达式，推导了光线方向余弦和入射角的测量不确定度表达式以及阵列探测器功率修正因子的不确定度表达式，并根据功率表达式进一步推导了功率测量不确定度表达式。由此建立了斜入射情况下激光功率阵列探测器测量方法及功率测量不确定度评定的一套较完整的方法。以典型参数为例，计算了斜入射下阵列探测器测量激光功率的不确定度，结果表明采用修正方法可显著减小激光功率测量不确定度。

Laser power measurement uncertainty of array detectors under oblique incidence

In order to measure laser power accurately under oblique incidence, a correction method for power responsivity of array detectors according to incidence angle is adopted. The expressions of directional cosines and incidence angle depending on the position of laser source, and the position and attitude angle of array detectors are derived. Measurement uncertainties of directional cosines, incidence angle and correction factor of array detectors are derived. The measurement uncertainty expression of laser power is then derived based on the expression of laser power. Therefore the measurement method of laser power and the evaluation method of the power measurement uncertainty under oblique incidence are completely developed. For an example with typical parameters, the power measurement uncertainty under oblique incidence is calculated. The result shows that it is valid to correct the measured laser power for the decrement of measurement uncertainty.