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H_2及H~ 对C_xH_(1-x)薄膜表面状态的影响
引用本文:吴卫东,罗江山,黄勇,张占文,许华,郑永铭,陆晓明,唐永建,赵纯培,陈红.H_2及H~ 对C_xH_(1-x)薄膜表面状态的影响[J].强激光与粒子束,2000(5).
作者姓名:吴卫东  罗江山  黄勇  张占文  许华  郑永铭  陆晓明  唐永建  赵纯培  陈红
基金项目:国家自然科学基金资助课题!( 199895 0 1),中国工程物理研究院院基金资助课题,高温高密度等离子体国家重点实验室基金重点项目资助
摘    要:系统研究了 H2 流量和 H 原位处理 Cx H1-x薄膜的时间对 Cx H1-x薄膜的稳定时间、表面悬挂键密度和表面电子局域化程度的影响 ,表明 Cx H1-x薄膜的长时间 H 原位处理是减小 Cx H1-x薄膜表面悬挂键密度的有效途径。

关 键 词:C_xH_(1-x)薄膜  悬挂键密度  局域化  ICF靶涂层技术

The Effect of H_2 and H~ on C_xH_(1-x) Film Surface State
WU Wei-dong-,LUO Jiang-shan-,HUANG Yong-,ZHANG Zhan-wen-,XU Hua-,ZHENG Yong-ming-,LU Xiao-ming-,TANG Yong -jian- ZHAO Chun-pei-,CHEN Hong-.The Effect of H_2 and H~ on C_xH_(1-x) Film Surface State[J].High Power Laser and Particle Beams,2000(5).
Authors:WU Wei-dong-  LUO Jiang-shan-  HUANG Yong-  ZHANG Zhan-wen-  XU Hua-  ZHENG Yong-ming-  LU Xiao-ming-  TANG Yong -jian- ZHAO Chun-pei-  CHEN Hong-
Institution:WU Wei-dong-1,LUO Jiang-shan-1,HUANG Yong-1,ZHANG Zhan-wen-1,XU Hua-1,ZHENG Yong-ming-1,LU Xiao-ming-1,TANG Yong -jian-1 ZHAO Chun-pei-2,CHEN Hong-2
Abstract:In this paper, the steady time of C xH 1-x film, the density of the surface dangling band and the l ocalization of the surface electronic state under the different H 2 flow rate a nd the different in-situ treatment time of H- were investigated. The effectiv e method with which the surface dangling band density is decreased is the long H - treatment time in-situ.
Keywords:C  xH    1-x film  the surface dangling band density  localization  ICF  coa ting layer
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