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Experimental clarification of orientation dependence of germanium PMOSFETs with AlzO3/GeOx/Ge gate stack |
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| Authors: | Yun Quan-Xin Li Ming An Xia Lin Meng Liu Peng-Qiang Li Zhi-Qiang Zhang Bing-Xin Xia Yu-Xuan Zhang Hao Zhang Xing Huang Ru and Wang Yang-Yuan |
| Institution: | Key Laboratory of Microelectronic Devices and Circuits (MOE), Institute of Microelectronics, Peking University, Beijing 100871, China |
| Abstract: | germanium, metal-oxide-semiconductor field-effect transistor, orientation |
| Keywords: | germanium metal-oxide-semiconductor field-effect transistor orientation |
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