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Role of Ga vacancies in enhancing the leakage current of GaN Schottky barrier ultraviolet photodetectors
Authors:Zhao De-Gang  Zhang Shuang  Liu Wen-Bao  Jiang De-Sheng  Zhu Jian-Jun  Liu Zong-Shun  Wang Hui  Zhang Shu-Ming  Yang Hui  Hao Xiao-Peng and Wei Long
Institution:State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; National Institute of Metrology, Beijing 100013, China; Institute of High Energy Physics, Chinese Academy of Sciences, Beijing 100039, China
Abstract:The leakage current of GaN Schottky barrier ultraviolet photodetectors is investigated. It is found that the photodetectors adopting undoped GaN instead of lightly Si-doped GaN as an active layer show a much lower leakage current even when they have a higher dislocation density. It is also found that the density of Ga vacancies in undoped GaN is much lower than in Si-doped GaN. The Ga vacancies may enhance tunneling and reduce effective Schottky barrier height, leading to an increase of leakage current. It suggests that when undoped GaN is used as the active layer, it is necessary to reduce the leakage current of GaN Schottky barrier ultraviolet photodetector.
Keywords:Ga vacancies  MOCVD  GaN  Schottky barrier photodetector
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