DWDM用薄膜窄带滤光片的容差特性模拟分析

讨论了用于DWDM系统的薄膜窄带滤光片在镀制过程中的监控方法及误差产生的机理,利用自行建立的计算机膜厚容差模拟程序,分析了多FabryPerot腔窄带滤光片的容差特性.发现多腔窄带滤光片各腔的误差灵敏度与腔的位置有关,且各腔间隔层组成材料不同,其对误差最敏感的膜层位置也不相同.

Simulation Analysis of Error Tolerance Characteristic of the Thin Film Narrow Band-pass Filter for DWDM

With the introduction of thin film filter’s application in DWDM and modern coating technology, it shows the high precision of filters is very important for communication system. In this paper, the monitoring errors and usual monitoring method during the deposition of narrow bandpass filters for DWDM are discussed, then the error tolerance characteristics of the Fabry-Perot narrow bandpass filters are analyzed by the simulated programme of coating deposition. The result shows that error sensitivity of the cavity is related to it’s position and with the difference of the spacer’s material,the most error sensitive layer’s position is also different.