| 透射式GaAs光电阴极AlGaAs/GaAs外延层X射线衍射摇摆曲线研究 |
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| 引用本文： | 李晓峰,张景文,高鸿楷,侯洵.透射式GaAs光电阴极AlGaAs/GaAs外延层X射线衍射摇摆曲线研究[J].光子学报,2002,31(4):458-462. |
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| 作者姓名： | 李晓峰 张景文 高鸿楷 侯洵 |
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| 作者单位： | 中国科学院西安光学精密机械研究所光电子学研究室,西安,710068 |
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| 摘 要： | 利用透射式GaAs光电阴极AlGaAs/GaAs外延层的结构特点及其X射线衍射摇摆曲线分析方法,解释了AlGaAs/GaAs外延层摇摆曲线半峰宽和其衍射角角位移随外延层生长温度升高而增大的现象.
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| 关 键 词： | GaAs AlGaAs X射线 光电阴极 衍射 外延 |
| 收稿时间： | 2001/7/5 |
| 修稿时间： | 2001年7月5日 |
THE X-RAY DIFFRACTION ROCKING CURVE OF AlGaAs/GaAs EPITAXIAL LAYER OF TRANSPARENT GaAs PHOTOCATHODE |
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| Li Xiaofeng,Zhang Jingwen,Gao Hongkai,Hou Xun.THE X-RAY DIFFRACTION ROCKING CURVE OF AlGaAs/GaAs EPITAXIAL LAYER OF TRANSPARENT GaAs PHOTOCATHODE[J].Acta Photonica Sinica,2002,31(4):458-462. |
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| Authors: | Li Xiaofeng Zhang Jingwen Gao Hongkai Hou Xun |
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| Institution: | Xi′an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi′an, 710068 |
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| Abstract: | This paper described the structure characteristics and analysis method of rocking curve of AlGaAs/GaAs epitaxial layer,explained the phenomenon of broading of FWHM and increasing of diffraction peak seperation of rocking curve of AlGaAs and GaAs epitaxial layer with their upgrading growth temperature. |
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| Keywords: | GaAs AlGaAs X-ray Photocathode Diffraction Epitaxy |
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