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Effect of atmospheric pressure dielectric barrier discharge air plasma on electrode surface
Authors:Changquan Wang  Xiangning He
Institution:a College of Electrical Engineering, Zhejiang University, Hangzhou 310027, PR China
b Institute of Technology, Xuzhou Normal University, Xuzhou 221116, PR China
Abstract:In order to study the influence of plasma on electrode, atmospheric pressure dielectric barrier discharge (DBD) air plasma is employed here to treat copper electrode surface. Plasma is generated between the parallel plate electrodes by means of high voltage produced by a high-frequency power supply with transformer. Electrode surface alterations induced by air plasma are investigated by using field emission scanning electron microscope (FE-SEM), X-ray energy dispersion spectroscopy (EDS) and contact angle measurement. The results show that DBD air plasma removes the organic contaminant on surface and causes electrode surface roughness, oxidization and nitridation. In addition, surface wettability is also improved, as concluded from contact angle measurements.
Keywords:52  40  Hf  68  37  Hk  81  05  Bx
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