Characteristics of sculptured Cu thin films and their optical properties as a function of deposition rate |
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Authors: | H Savaloni F Babaei S Song |
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Institution: | a Department of Physics, University of Tehran, North-Kargar Street, Tehran, Iran b Thin Film Centre, The University of The West of Scotland, High Street, Paisley, UK |
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Abstract: | Sculptured copper thin films were deposited on glass substrates, using different deposition rates. The nano-structure and morphology of the films were obtained, using X-ray diffraction (XRD), atomic force microscopy (AFM) and scanning electron microscopy (SEM). Their optical properties were measured by spectrophotometry in the spectral range of 340-850 nm. The real and imaginary refractive indices, film thickness and fraction of metal inclusion in the film structure were obtained from optical fitting of the spectrophotometer data. |
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Keywords: | 61 05 &minus a 68 37 &minus d 81 15 &minus z 78 20 ci 78 68 +m |
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