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Influence of the substrate position angle on the adhesion of ZnO thin films deposited on polyimide foil substrates |
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| Authors: | Hu ChangjiZhu Daoyun He Zhenhui Fu WeichunZhong Qi |
| Institution: | a State Key Laboratory of Optoelectronic Materials and Technologies, Center for Space Technology, and School of Physics and Engineering, Sun Yat-sen University, Guangzhou 510275, PR China b Experiment Teaching Department, Guangdong University of Technology, Guangzhou, 510006, PR China c China Academy of Spacecraft Technology, Beijing 100094, PR China |
| Abstract: | ZnO thin films, as polymer protection layers against ultraviolet radiation, were deposited on polyimide foil substrates using cathodic vacuum arc deposition technique. X-ray diffraction results showed that all the samples had (0 0 2) preferred orientation and the FWHM decreased as the position angle decreased. A fragmentation test was employed to investigate the influence of substrate position angle on the adhesion of ZnO thin films. It was found that the intrinsic adhesion between the ZnO film and the polyimide substrate is about 60 MPa at the substrate position angle of 0°. When the position angle increases to ±60°, the value of intrinsic adhesion decreases to about 30 MPa. |
| Keywords: | 52 77 Dq 61 05 cp |
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