基于白光干涉的光学球面半径测量研究

光学球面曲率半径是决定光学球面光学特性的重要参量,通过测量光学球面的曲率半径，可以审核光学元件设计制造质量。在基于白光干涉理论基础上，将莫尔光栅位移测量系统及CCD数字图像采集处理系统集成到迈克尔逊干涉仪上，利用CCD数字图像处理技术，构建了光学球面曲率半径自动测量系统。该测量系统对于大曲率半径的光学球面测量精度较高；对于半径R＝71.2037mm的光学球面,其测量标准误差σR＝0.4723mm。实验结果表明：设计的光学球面自动测量系统可以对大曲率半径光学球面实现高精度测量。

Measurement of optical sphere radius with white light interference

The curvature radius of optical sphere is an important parameter to determine the properties of an optical sphere. The measurement result of the spherical curvature radius can be used to assess the quality of an optical component. Based on the theory of white light interference,a Moire raster displacement measurement system and a CCD digital image acquisition system are integrated into Michelson interferometer to form a semi-automatic measurement system for measuring the curvature radii of optical spheres. The system is accurate in measuring big curvature radii. As for the spherical radius of 71.2037 mm,the standard error of 472.3 μm can be obtained. The experiment result shows that the system can realize high precision measurement for big curvature radii of optical spheres.