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关于提高傅里叶变换轮廓术测量精度的研究
引用本文:郭文静,石兵华,金永.关于提高傅里叶变换轮廓术测量精度的研究[J].应用光学,2013,34(5):845-848.
作者姓名:郭文静  石兵华  金永
作者单位:中北大学 电子测试技术国家重点实验室,山西 太原 030051
摘    要: 针对傅里叶变换轮廓术在实际测量中容易受到光学成像系统和计算方法的影响而使得测量结果不精确的现象,提出基于最小二乘法的条纹图像预处理技术,并讨论了滤波器的设计、相位展开的方法及系统标定模型对测量结果的影响。实验表明,改进后的方法其测量误差在2%以内。

关 键 词:傅里叶变换轮廓术  预处理  滤波器  相位展开  系统标定

Measurement accuracy improvement of Fourier transform profilometry
GUO Wen-jing,SHI Bing-hua,JIN Yong.Measurement accuracy improvement of Fourier transform profilometry[J].Journal of Applied Optics,2013,34(5):845-848.
Authors:GUO Wen-jing  SHI Bing-hua  JIN Yong
Institution:National Key Lab for Electronic Measurement Technology, North University of China, Taiyuan 030051, China
Abstract:During the actual measurement, the accuracy of Fourier transform profilometry (FTP) is vulnerable to the hardware and calculation methods, the fringe image preprocessing technique is proposed based on the least square method. The filter design, the phase unwrapping algorithm and influence of system calibration model on the  measurement results are discussed. The result shows that, this improved FTP can reduce the errors, which are caused by the sampling shortage, spectrum leakage, spectrum aliasing, phase wrapping and system calibration. The measurement error of the improved method can be controlled within 2%.
Keywords:FTP  preprocessing  filter  phase unwrapping  system calibration
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