| 微小孔径激光器的研制与近场测试 |
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| 引用本文： | 康香宁,宋国峰,孙永伟,叶晓军,陈良惠.微小孔径激光器的研制与近场测试[J].光学技术,2003,29(6):682-684. |
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| 作者姓名： | 康香宁 宋国峰 孙永伟 叶晓军 陈良惠 |
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| 作者单位： | 中国科学院半导体研究所光电子器件国家工程中心,北京,100083 |
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| 基金项目： | 国家863计划资助项目(2002AA313060) |
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| 摘 要： | 介绍了一种用于高密度近场存储领域的新型微小孔径激光器(VSAL)。为了解决由腔面金属膜造成的激光器PN结短路的问题,在激光器中引入了窗口隔离区,不仅降低了器件制备的难度,而且也提高了器件的性能和成品率。采用聚焦离子束刻蚀技术成功地制备了输出功率为0 3mW的激光器,利用矩阵方法通过远场测量值估算了激光器的近场分布。
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| 关 键 词： | 近场光存储 微小孔径激光器 聚焦离子束 近场分布 |
| 文章编号： | 1002-1582(2003)06-0682-03 |
| 修稿时间： | 2003年5月22日 |
Fabrication and near-field measurement of very small aperture lasers |
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| Abstract: | A method for producing very small aperture laser (VSAL) source used in high resolution near field optical data storage is reported. The windowed regions are introduced to prevent from shorting the PN junction with metal coating. It facilitates producing VSAL by simplified technology and improves the laser performance. A VSAL is demonstrated by focused ion beam (FIB) and the output power is 0.3mW. The near field distribution is calculated by the matrix methods from the far field distribution of the lasers. |
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| Keywords: | Near-field optical data storage very small aperture lasers focused ion beam near field distribution |
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