| AlGaAs/GaAs波导薄膜X射线双晶衍射研究 |
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| 引用本文： | 麦振洪,崔树范,王超英,吴兰生.AlGaAs/GaAs波导薄膜X射线双晶衍射研究[J].物理学报,1991,40(6):969-977. |
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| 作者姓名： | 麦振洪 崔树范 王超英 吴兰生 |
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| 作者单位： | 中国科学院物理研究所,北京,100080 |
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| 摘 要： | 本文应用X射线双晶衍射研究AlGaAs/GaAs波导结构薄膜。结合实验结果,应用X射线衍射动力学理论。计算衬底和多层膜的反射强度,得到样品的真实结构。分析影响薄膜双晶衍射摇摆曲线的若干因素。
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| 关 键 词： | AlGaAs GaAs 薄膜 X射线 双晶衍射 |
| 收稿时间： | 1990-09-19 |
STUDY OF AlGaAs/GaAs WAVEGUIDE STRUCTURE BY X-RAY DOUBLE CRYSTAL DIFFRACTION |
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| MAI ZHEN-HONG,GUI SHU-FAN,WANG CHAO-YING and WU LAN-SHENG.STUDY OF AlGaAs/GaAs WAVEGUIDE STRUCTURE BY X-RAY DOUBLE CRYSTAL DIFFRACTION[J].Acta Physica Sinica,1991,40(6):969-977. |
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| Authors: | MAI ZHEN-HONG GUI SHU-FAN WANG CHAO-YING and WU LAN-SHENG |
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| Abstract: | An AlGaAs/GaAs waveguide structure sample was investigated by X-ray double crystal diffraction technique. Based on the X-ray dynamical diffraction theory the reflection intensities of the substrate and the films were calculated. Comparing the calculated results with the experimental ones, the real structure of the sample was obtained. The factors affecting the double crystal diffraction recking curves are discussed. |
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