a-C:H薄膜的光致发光

利用射频辉光放电法沉积a-C:H薄膜,研究不同测量温度、不同退火温度光致发光光谱的变化,以及光致发光光谱随光子能量的变化,实验表明:随着测量温度的升高发光效率降低,用非晶碳网络的二相系统模型对这些结果作了解释。另外,光致发光光谱也随着激发光能量的不同而变化,当激发光能量接近光学带隙E_opt时,发光强度最高。 关键词：

A STUDY ON PHOTOLUMINESCENCE IN a-C:H FILMS

In this paper, the changes of photoluminescence (PL) spectra according to varied measuring temperatures, annealing temperatures, and excition wavelength in a-C:H films deposited by rf glow discharge are studied. The experimental results show that the PL efficiency becomes lower with increasing the measuring temperature or annealing temperature. We give an explanation to the phenomena using the two-phase model in a-C:H system. Furthermore, the PL spectra also changes with excitation energy; and as the latter geis near the optical gap E_opt, the emission intensity reaches its maximum.