| 大功率垂直腔面发射激光器的相干性测量与分析 |
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| 引用本文： | 史晶晶,秦莉,宁永强,刘云,张金龙,曹军胜,王立军.大功率垂直腔面发射激光器的相干性测量与分析[J].发光学报,2011,32(8):834-838. |
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| 作者姓名： | 史晶晶 秦莉 宁永强 刘云 张金龙 曹军胜 王立军 |
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| 作者单位： | 1. 中国科学院 激发态物理重点实验室 长春光学精密机械与物理研究所, 吉林 长春 130033;
2. 中国科学院 研究生院, 北京 100039 |
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| 基金项目： | 国家自然科学基金重点项目(90923037)资助项目 |
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| 摘 要： | 通过有机化学气象沉积(MOCVD)技术在n型GaAs衬底上生长制作了发射波长为850nm的VCSELs4×4列阵器件,介绍了VCSELs的制作工艺流程.对器件进行了相干性测量,计算了干涉条纹可见度,分析了影响干涉条纹可见度的因素.
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| 关 键 词： | 垂直腔面发射激光器 列阵 相干性 |
| 收稿时间： | 2011-04-08 |
Coherent Measurement and Analysis of Vertical-cavity Surface-emitting Laser |
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| SHI Jing-jing,QIN Li,NING Yong-qiang,LIU Yun,ZHANG Jin-long,CAO Jun-sheng,WANG Li-jun.Coherent Measurement and Analysis of Vertical-cavity Surface-emitting Laser[J].Chinese Journal of Luminescence,2011,32(8):834-838. |
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| Authors: | SHI Jing-jing QIN Li NING Yong-qiang LIU Yun ZHANG Jin-long CAO Jun-sheng WANG Li-jun |
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| Institution: | 1. Key Laboratory of Excited State Processes, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China;
2. Graduate School of Chinese Academy of Sciences, Beijing 100039, China |
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| Abstract: | The devices of top-emitting 4×4 VCSELs array with the emission wavelength of 850 nm was produced, and the production process of VCSELs were described. Coherence of the device were measured, the visibility of interference figure was calculated, and the effect factor of interference fringe visibility was also analyzed. |
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| Keywords: | vertical-cavity surface-emitting laser array coherence |
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