溶胶-凝胶TiO2和SiO2光学膜的结构

本文研究了TiO₂和SiO₂溶胶-凝胶光学膜在低温热处理下的组分、形貌特征、光散射特性.AES分析结果表明,在TiO₂膜和SiO₂膜的交界面处,Ti和Si相互扩散,从而证实了在多层膜中,膜层之间、膜层和基底之间有Ti-O-Si(或Si-O-Ti,或Si-O-Si)化学键形成.AES和ESCA分析结果显示溶胶-凝胶膜经过低温处理后C的含量较高,这归结为溶胶—凝胶膜的工艺特点.AFM测试结果显示,溶胶—凝胶TiO₂光学膜的表面形貌具有显著的柱状结构,薄膜表面起伏大约是7.5nm.TiO₂,SiO₂单层膜的表面散射率随着热处理温度的提高而变大,对于不同陈化时间的溶液镀制的膜有不同的表面散率.

THE STRUCTURE OF TiO2 AND SiO2 OPTICAL COATINGS PREPARED BY SOL-GEL METHOD

In this paper,TiO2 and SiO2 sol-gel optical coatings' element,structure,surfacemorphology and light scatter properties under different process and low heat treatment temperature are investigated.AES result shows,in the alternative TiO2 and SiO2 multi-layer interference coatings,there's a small quantity of Si and Ti diffused into each other's side at their interface and Ti-O-Si(or Si-O-Ti)chemical bond is formed in the layer's interface region.Either TiO2 or SiO2 film has a high content of carbon that is caused by the character of sol-gel process.AFM result shows,sol-gel TiO2 single layer films' surface morphology has an apparent shape like column.The films' surface undulation is about 7.5nm.The surface scattering loss of the coatings increases with increasing annealing temperature,the film made from sol of different aging time has different scatting loss.