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Tailoring Broadband Antireflection on a Silicon Surface through Two‐Step Silver‐Assisted Chemical Etching |
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| Authors: | Dr Chia‐Yun Chen Dr Wen‐Jin Li Dr Hsin‐Hwa Chen |
| Institution: | Material and Chemical Research Laboratories, Industrial Technology Research Institute, Rm. 834, Bldg. 52, 8F, 195, Sec. 4, Chung Hsing Rd., Chutung, Hsinchu (Taiwan), Fax: (886)?3‐5820207 |
| Abstract: | |
| Keywords: | antireflection chemical etching nanostructures refraction index silicon |