Use of photoresist templates in the synthesis of highly-ordered arrays of titania nanorods

Template synthesis of nanostructures entails the deposition of the desired materials within the pores of a nanoporous membrane or solid. Nanofibrils or tubules of the desired material are obtained within the pores depending on the deposition time and parameters. Methods such as electrochemical and electroless deposition, in situ polymerization, and sol–gel process have been used to deposit nanomaterials within the nanopores of templates such as track-etch polymeric membranes and anodic alumina. This paper reports on the first use of photoresist spin-coated on a conductive glass substrate as a template for nanofabrications. TiO₂ nanofibrils in diameters were synthesized by sol–gel process within the pores of the template. Removal of the template resulted in highly-ordered arrays of nanofibrils vertically standing on the conducting glass substrate. The aspect rations of the obtained nanofibrils were similar to those of the template nanopores, 35 nm in diameter and ∼1.3 microns in length. The photoresist template is shown to be functionally similar to anodic alumina template.