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Recoil spectrometry: Ion accelerator based elemental characterisation of surface layers
Authors:Harry J Whitlow  Margaretha Andersson  Mikael Hult  Leif Persson  Mohamed El Bouanani  Mikael Östling  Carina Zaring  Nils Lundberg  David D Cohen  Nick Dytlewski  Peter N Johnston  Ian F Bubb  Scott R Walker  Erik Johanson  Sture Hogmark  P Anders Ingemarsson
Institution:(1) Department of Nuclear Physics, Lund Institute of Technology, Sölvegatan 14, S-223 62 Lund, Sweden;(2) Department of Inorganic Chemistry, Uppsala University, Box 531, S-751 21 Uppsala, Sweden;(3) Department of Electronics, Solid State Electronics, Royal Institute of Technology, PO Box Electrum 229, S-164 40 Kista, Sweden;(4) Australian Nuclear Science and Technology Organisation, PMB 1, 2234 Menai, Australia;(5) Department of Applied Physics, The Royal Melbourne Institute of Technology, GPO Box 2476V, 3001 Melbourne, Australia;(6) Teknikum, Uppsala University, Box 531, S-751 21 Uppsala, Sweden;(7) Present address: Institute for Surface Chemistry, Box 5607, S-11486 Stockholm, Sweden
Abstract:Recoil Spectrometry covers a group of techniques that are very similar to the well known Rutherford backscattering Spectrometry technique, but with the important difference that one measures the recoiling target atom rather than the projectile ion. This makes it possible to determine both the identity of the recoil and its depth of origin from its energy and velocity, using a suitable detector system. The incident ion is typically high-energy (30–100MeV)35C1,81Br or127I. Low concentrations of light elements such as C, O and N can be profiled in a heavy matrix such as Fe or GaAs. Here we present an overview of mass and energy dispersive recoil Spectrometry and illustrate its successful use in some typical applications.
Keywords:elemental analysis  depth profiling  surfaces  interface  C  O  N  Al  Si  S  P  Ni  Zn  zinc dialkyldithiophosphate  GaAs  AlxGa1–  x As  InP  tribology  lubricating oils  boundary lubrication  ferrous metals  time-of-flight  quantum wells  thin-films  metallisation  ion beam analysis  recoil atoms  ion accelerators
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