Characterization of Cr/6H-SiC(0 0 0 1) nano-contacts by current-sensing AFM |
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Authors: | Mi?osz Grodzicki Szymon Smolarek Piotr Mazur Stefan Zuber Antoni Ciszewski |
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Institution: | Institute of Experimental Physics, University of Wroclaw, pl. Maxa Borna 9, 50-204 Wroclaw, Poland |
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Abstract: | The electrical properties and interface chemistry of Cr/6H-SiC(0 0 0 1) contacts have been studied by current-sensing atomic force microscopy (CS-AFM) and X-ray photoelectron spectroscopy (XPS). Cr layers were vapor deposited under ultrahigh vacuum onto both ex situ etched in H2 and in situ Ar+ ion-bombarded samples. The Cr/SiC contacts are electrically non-uniform. Both the measured I-V characteristics and the modeling calculations enabled to estimate changes of the Schottky barrier height caused by Ar+ bombardment. Formation of ohmic nano-contacts on Ar+-bombarded surfaces was observed. |
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Keywords: | 72 80 Jc 79 60 Dp 68 37 Ps |
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