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表面等离子体调制的纳米孔径垂直腔面发射激光器
引用本文:高建霞,宋国峰,郭宝山,甘巧强,陈良惠.表面等离子体调制的纳米孔径垂直腔面发射激光器[J].物理学报,2007,56(10):5827-5830.
作者姓名:高建霞  宋国峰  郭宝山  甘巧强  陈良惠
作者单位:中国科学院半导体研究所,纳米光电子实验室,北京,100083
基金项目:国家高技术研究发展计划(863计划)
摘    要:在普通850nm垂直腔面发射激光器基础上制备了表面等离子体调制的纳米孔径垂直腔面发射激光器.当小孔直径为200nm,周围光栅的周期为400nm时,在15mA驱动电流下最大输出光功率达到了0.3mW.介绍了该器件的制备工艺,并从实验和理论两方面分析了周期性光栅结构对光束的约束作用.

关 键 词:表面等离子体  纳米孔径垂直腔面激光器  输出光功率  远场特性
收稿时间:1/8/2007 12:00:00 AM
修稿时间:2007-01-08

Surface plasmon modulated nano-aperture vertical-cavity surface-emitting laser
Gao Jian-Xia,Song Guo-Feng,Guo Bao-Shan,Gan Qiao-Qiang,Chen Liang-Hui.Surface plasmon modulated nano-aperture vertical-cavity surface-emitting laser[J].Acta Physica Sinica,2007,56(10):5827-5830.
Authors:Gao Jian-Xia  Song Guo-Feng  Guo Bao-Shan  Gan Qiao-Qiang  Chen Liang-Hui
Institution:Nano- Optoelectronics Laboratory, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Abstract:Surface plasmon modulated nano-aperture vertical-cavity surface-emitting lasers were fabricated from common 850nm VCSELs. When the diameter of the aperture was 200nm, and the period of grating was 400nm, the maximum far-field output power reached 0.3mW at a driving current of 15mA. The fabrication process was described and the beaming properties were studied via experimentally and theoretically.
Keywords:surface plasmon  nano-aperture VCSELs  output power  far-field property
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